Silicon Prism-based NIR Spectrometer Utilizing MEMS Technology
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Recently, infrared (IR) spectrometers have been required in various fields such as environment, safety, mobile, automotive, and mil- itary. This IR dispersive sensor detection method of substances is widely used. In this study, we fabricated a silicon (Si) prism-basednear infrared (NIR) spectrometer utilizing micro electro mechanical system (MEMS) technology. Si prism-based NIR spectrometer uti-lizing MEMS technology consists of upper, middle, and lower substrates. The upper substrate passes through the incident IR ray selec- tively. The middle substrate, acting as a prism, disperses and separates the incident IR beam. The lower substrate has an amorphous Si(a-Si)-based bolometer array to detect the IR spectrum. The fabricated Si prism-based NIR spectrometer utilizing MEMS technologyhas the advantage of a simple structure, easy fabrication steps, and a wide NIR region operating range.
Abstract
Recently, infrared (IR) spectrometers have been required in various fields such as environment, safety, mobile, automotive, and mil- itary. This IR dispersive sensor detection method of substances is widely used. In this study, we fabricated a silicon (Si) prism-basednear infrared (NIR) spectrometer utilizing micro electro mechanical system (MEMS) technology. Si prism-based NIR spectrometer uti-lizing MEMS technology consists of upper, middle, and lower substrates. The upper substrate passes through the incident IR ray selec- tively. The middle substrate, acting as a prism, disperses and separates the incident IR beam. The lower substrate has an amorphous Si(a-Si)-based bolometer array to detect the IR spectrum. The fabricated Si prism-based NIR spectrometer utilizing MEMS technologyhas the advantage of a simple structure, easy fabrication steps, and a wide NIR region operating range.
참고문헌 (7)
- P. Werlea, "Near-and mid-infrared laser-optical sensors for gas analysis", Opt. Lasers Eng, 37, pp.101~114 (2002)
- H. W. Siesller, "Near-Infrared Spectroscopy: principles, instruments, applications" (2002), WILEY-VCH Verlag GmbH
- H. O. Kang, "Fabrication and performance analysis of an amorphous silicon based thermal IR detector", Nano, 2010, 696~699
- P. Wagli, "Norland optical adhesive(NOA81)microchannels with adjustable wetting behavior and high chemical resistance against a range of mid-infrared-transparent organic solvents", Sens. Actuator B-Chem, 126, pp.994~1001 (2011)
- S. Krimm, "Infrared Spectra of High Polymers. II. Polyethylene", J. Chem. Phys, 25(3), pp.549~562 (1956)
- Bo-Cai Gap, "Column Atmospheric Water Vapor and Vegetation Liquid Water Retrievals From Airborne Imaging Spectrometer Date", J. Geophys. Res, 95, pp.3549~3564 (1990)
- Peter Snoer Jensen, "Influence of Temperature on Water and Aqueous Glucose Absorption Spectra in the Near-and Mid-Infrared Regions at Physiologically Relevant Temperatures", Appl. Spectrosc, 57(1), pp.28~36 (2003)