저항성 홀배열이 적용된 볼로미터의 적외선 흡수 특성 변화
Variation in IR Absorption Characteristics of a Bolometer by Resistive Hole-array Patterns
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In order to develop a highly sensitive infrared sensor, it is necessary to develop techniques for decreasing the rate of heat absorption and the transition of the absorption wavelength to a longer wavelength, both of which can be induced by decreasing the pixel size of the bolometer. Therefore, in this study, 1 µm hole-arrays with a subwavelength smaller than the incident infrared wavelength wereformed on the amorphous silicon-based microbolometer pixels in the absorber, which consisted of a TiN absorption layer, an a-Si resis-tance layer and a SiNx membrane support layer. We demonstrated that it is possible to reduce the thermal time constant by 16% relative to the hole-patternless bolometer, and that it is possible to shift the absorption peak to a shorter wavelength as well as increase absorptionin the 4–8 µm band to compensate for the infrared long-wavelength transition. These results demonstrate the potential for a newapproach to improve the performance of high-resolution microbolometers.
Abstract
In order to develop a highly sensitive infrared sensor, it is necessary to develop techniques for decreasing the rate of heat absorption and the transition of the absorption wavelength to a longer wavelength, both of which can be induced by decreasing the pixel size of the bolometer. Therefore, in this study, 1 µm hole-arrays with a subwavelength smaller than the incident infrared wavelength wereformed on the amorphous silicon-based microbolometer pixels in the absorber, which consisted of a TiN absorption layer, an a-Si resis-tance layer and a SiNx membrane support layer. We demonstrated that it is possible to reduce the thermal time constant by 16% relative to the hole-patternless bolometer, and that it is possible to shift the absorption peak to a shorter wavelength as well as increase absorptionin the 4–8 µm band to compensate for the infrared long-wavelength transition. These results demonstrate the potential for a newapproach to improve the performance of high-resolution microbolometers.
참고문헌 (9)
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