비정질 실리콘 기반의 비냉각형 16×16 적외선 초점면배열의 개발
Uncooled amorphous silicon 16×16 infrared focal plane arrays development
1
조회
0
다운로드
0
인용
0
참고문헌
키워드
초록
This paper describes the design and fabrication of 16×16 microbolometer infrared focal plane arrays based on iMEMS technology. Amorphous silicon was used for infrared-sensitive material, and it showed the resistance of 18 Mohm and the temperature coefficient of resistivity of −2.4 %. The fabricated sensors exhibited responsivity of 78 kV/W and thermal time constant of 8.0 msec at a bias voltage of 0.5 V. The array performances had satisfactory uniformity less than 5 % within one-sigma. Also, 1/f noise of pixel was measured and the noise factor of 6×10-11 was extracted. Finally, we obtained detectivity of 1.27×109cmHz0.5/W and noise equivalent temperature difference of 200 mK at a frame rate of 30 Hz.
Abstract
This paper describes the design and fabrication of 16×16 microbolometer infrared focal plane arrays based on iMEMS technology. Amorphous silicon was used for infrared-sensitive material, and it showed the resistance of 18 Mohm and the temperature coefficient of resistivity of −2.4 %. The fabricated sensors exhibited responsivity of 78 kV/W and thermal time constant of 8.0 msec at a bias voltage of 0.5 V. The array performances had satisfactory uniformity less than 5 % within one-sigma. Also, 1/f noise of pixel was measured and the noise factor of 6×10-11 was extracted. Finally, we obtained detectivity of 1.27×109cmHz0.5/W and noise equivalent temperature difference of 200 mK at a frame rate of 30 Hz.
참고문헌 (10)
- D. Murphy, "640 ×512 17 μm micro-bolometer FPA and sensor development", Proceeding of SPIE, 통권 : 6542 (2007)
- R. J. Blackwell, "17 mm pixel 640 ×480 microbolometer FPA development at BAE systems", Proceeding of SPIE, 통권 : 6542 (2007)
- C. Li, "Recent development of ultra small pixel uncooled focal plane arrays at DRS", Proceeding of SPIE, 통권 : 6542 (2007)
- 전상훈, "SIP형 적외선 16×2 Microbolometer FPA의 개발", proceedings of KMEMS (2008)
- 김진수, "볼로미터형 적외선 센서의 신호처리회로 설계 및 특성", 센서학회지, 16(6), pp.475~483 (2007), 한국센서학회
- 서상희, "적외선 센서", ROIC접합을 위한 자동 평행 배열 방식의 플립칩 본더, 2001, pp.10(5), 65~70
- 김대원, "적외선 및 가시광선의 센서 융합시스템의 개발", 센서학회지, 9(1), pp.44~50 (2000)
- E. Mottin, "Uncooled amorphous silicon technology enhancement for 25m pixel pitch achievement", Proceeding of SPIE, 통권 : 4820 (2003)
- 조성목, "Infrared Focal Plane Array 용 MEMS 구조체 개발", in proceedings of KMEMS, pp.459~462 (2007)
- Paul W. Kruse, "Uncooled Infrared Imaging Arrays and Systems" (1997), Academic Press