전기도금 공정으로 제조한 Bi-Te박막의 열전특성 및미세열전소자 형성용 포토레지스트 공정
Thermoelectric Characteristics of the Electroplated Bi-Te Films andPhotoresist Process for Fabrication of Micro Thermoelectric Devices
0
조회
0
다운로드
4
인용
0
참고문헌
초록
Abstract
Thermoelectric properties of the electrodeposited Bi-Te films and photoresist process have been investigated to apply for thermoelectric thin film devices. After plating in Bi-Te solutions of 20 mM concentration, which were prepared by dissolving Bi2O3 and TeO2 into 1M HNO3, thermoelectric properties of the films were characterized with variation of the Te/(Bi+Te) ratio in a plating solution. With increasing the Te/(Bi+Te) ratio in the plating solution from 0.5 to 0.65, Seebeck coefficient of Bi-Te films changed from -59mV/K to -48mV/K and electrical resistivity was lowered from 1 mW-cm to 0.8 mW-cm due to the increase in the electron concentration. Maximum power factor of 3.5´10-4 W/K2-m was obtained for the Bi-Te film with the Bi2Te3 stoichiometric composition. Using multilayer overhang process, the photoresist pattern to form thermoelectric legs of 30 m depth and 100m diameter was successfully fabricated for micro thermoelectric device applications.
참고문헌 (16)
- "The powder metallurgy of n-type Bi2Te2", pp.45~ (1968)
- "Orientation analysis of the anisotropic galvanomagnetism of sintered Bi2Te3" (1990)
- "Design and engineering of thermoelectric cooling devices" (1991)
- "Thermoelectric generators on the basis of" (1991)
- "Thermo-electric generator for diesel trucks" (1991)
- "Dopant distribution in PbTe single crystals", fa (1992)
- "CRC Handbook of Thermoelectrics" (1994), Lewis Publishers
- "Mechanical Alloying Process and Thermoelectric Properties of p-Type (Bi1-xSbx)2Te3", 36, pp.41~ (1998)
- "Thermoelectric properties of the hot-ressed (Bi0.2Sb0.8)2Te3 with addition of BN particles as phonon scattering centers", 37, pp.609~ (1999)
- "alloys for Peltier cooling-a review" (1972)
- "Low-dimensional thermoelectric materials", 41, pp.679~ (1999)
- "Where there is heat, there Is a way", 11, pp.30~ (2002), Interface
- "Solid-state power generation and cooling micro", nanodevices for distributed system architectures, June2001, ~[DOI]
- "Electrodeposition of Bi2Te3 for nanowire application", 449(452), pp.377~380 (2004)
- "Thermal properties of high quality single crystals of bismuth telluride- Part I" (1988)
- "CRC Handbook of Thermoelectrics" (1994), Lewis Publishers