박막레그 직경에 따른 열전박막모듈의 열에너지 하비스팅 특성 비교
Comparison of Thermal Energy Harvesting Characteristics of Thermoelectric Thin-Film Modules with Different Thin-Film Leg Diameters
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초록
두께가 20 μm 이며, 직경이 각기 100 μm, 300 μm, 500 μm인 p형 Sb2Te3와 n형 Bi2Te3 박막레그들을 전기도금하여 열전박막모듈을 형성한 후, 박막레그의 직경에 따른 출력전압과 출력전력을 비교하였다. 100 μm 직경 박막레그들로 구성된 모듈은 ΔT = 36.7K에서 365 mV, 300 μm 직경 박막레그들로 형성한 모듈은 ΔT = 37.5K에서 142 mV, 500 μm 직경 박막레그들로 제작한 모듈은 ΔT = 36.1K에서 53 mV의 open circuit 전압을 나타내었다. 100 μm 직경 박막레그 모듈은 ΔT = 36.7K에서 845 μW, 300 μm 직경 박막레그 모듈은 ΔT = 37.5K에서 631 μW, 500 μm 직경 박막레그 모듈은 ΔT = 36.1K에서 276 μW의 최대출력전력을 나타내었다.
Abstract
Thermoelectric thin film modules were fabricated by electroplating p-type Sb2Te3 and n-type Bi2Te3 thin film legs with the same thickness of 20 μm and different diameters of 100 μm, 300 μm, and 500 μm, respectively. The output voltage and output power of thin film modules were measured and compared as a function of the leg diameter. The modules processed with thin film legs of 100 μm, 300 μm, and 500 μm-diameter exhibited open circuit voltages of 365 mV at ΔT = 36.7K, 142 mV at ΔT = 37.5K, and 53 mV at ΔT = 36.1K, respectively. Maximum output powers of 845 μW at ΔT = 36.7K, 631 μW at ΔT = 37.5K, and 276 μW at ΔT = 36.1K were obtained for the modules fabricated with the thin film legs of 100 μm, 300 μm, and 500 μm-diameter, respectively.
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