도핑농도에 따른 다결정 3C-SiC 박막의 기계적 특성
Mechanical properties of polycrystalline 3C-SiC thin films with various doping concentrations
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This paper describes the mechanical properties of poly(polycrystalline) 3C-SiC thin films with various doping concentration, in which poly 3C-SiC thin film’s mechanical properties according to the n-doping concentration 1(9.2 × 1015 cm−3), 3(5.2×1017 cm−3), and 5 %(6.8×1017 cm−3) respectively were measured by nano indentation. In the case of 9.2×1015 cm−3 n-doping concentration, Young’s modulus and hardness were obtained as 270 and 30 GPa, respectively. When the surface roughness according to n-doping concentrations was investigated by AFM(atomic force microscope), the roughness of poly 3C-SiC thin films doped by 5 % concentration was 15 nm, which is also the best of them.
Abstract
This paper describes the mechanical properties of poly(polycrystalline) 3C-SiC thin films with various doping concentration, in which poly 3C-SiC thin film’s mechanical properties according to the n-doping concentration 1(9.2 × 1015 cm−3), 3(5.2×1017 cm−3), and 5 %(6.8×1017 cm−3) respectively were measured by nano indentation. In the case of 9.2×1015 cm−3 n-doping concentration, Young’s modulus and hardness were obtained as 270 and 30 GPa, respectively. When the surface roughness according to n-doping concentrations was investigated by AFM(atomic force microscope), the roughness of poly 3C-SiC thin films doped by 5 % concentration was 15 nm, which is also the best of them.
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