시뮬레이션을 활용한 흐름관점의 반도체 설비관리 기법에 관한 연구
Study on Flow Balance Analysis for Semiconductor Photo Inline Equipment using Simulation Modeling Approach
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초록
최근 반도체 산업을 둘러싼 치열한 글로벌 경쟁환경으로 인한 끊임없는 원가혁신 요구로 반도체 메모리공정의 핵심공정인 Photo공정의 활용률(utilization) 극대화를 통한 loss의 최소화에 대한 관심이 높아지고 있다. 이러한 Photo공정설비의 loss분석은 설비 내 발생되는 변동을 시뮬레이션으로 구현하여 동적(dynamic)인 상황에서 발생되는 loss를 예상하고, scanner의 능력을 저해하는 원인을 인지하여 개선안을 적용했을 때의 효과를 예측하는 일련의 체계적인 절차를 통해서만 가능할 것이다. 본 연구에서는 이를 위해 새로운 Flow Balance Analysis(FBA) 기법을 제시하고 이를 활용하여 Photo설비 내 scanner의 능력저해로 인해 발생되는 loss를 최소화하기위한 다양한 개선안을 도출하고 이를 검증함으로써 설비 내부의 웨이퍼 흐름과 관련하여 각 unit들 간의 비 동기화에 의해 발생하는 loss의 근원을 차단할 수 있는 새로운 가능성을 제시하였다.
Abstract
Since the global market environment around semiconductor industries has become intensively competitive lately, cost saving efforts become the one of the most successful factors in the semiconductor memory business. These cost saving efforts generally focus on “Photo process” step in the semiconductor memory business because the “Photo process” step is the one of most critical steps in the semiconductor memory manufacturing. To save “photo process” cost, the loss analysis of “Photo process” equipment is critical and the loss analysis of the equipment can only be possible when we develop an appropriate simulation model to detect possible causes for underutilization of the equipment(scanner) and expect the amount of possible losses due to that underutilization, and provide and a structural algorithm to improve the utilization of the equipment. In this study, Flow Balance Analysis (FBA) algorithm was proposed and tested with variety of plans to improve the Photo Equipment utilization, and thus we suggested new possibilities that can significantly reduce the losses caused by the non-synchronization between units inside of Photo Equipment system.
참고문헌 (9)
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