반도체 포토공정에서 총 가중작업흐름시간을 최소화하기 위한 스케쥴링 방법론에 관한 연구
Scheduling Algorithms for Minimizing Total Weighted Flowtime in Photolithography Workstation of FAB
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This study focuses on the problem of scheduling wafer lots of several recipe(operation condition) types in the photolithography workstation in a semiconductor wafer fabrication facility, and sequence-dependent recipe set up times may be required at the photolithography machines. In addition, a lot is able to be operated at a machine when the reticle(mask) corresponding to the recipe type is set up in the photolithography machine. We suggest various heuristic algorithms, in which developed recipe selection rules and lot selection rules are used to generate reasonable schedules to minimizing the total weighted flowtime. Results of computational tests on randomly generated test problems show that the suggested algorithms outperform a scheduling method used in a real manufacturing system in terms of the total weighted flowtime of the wafer lots with ready times.
Abstract
This study focuses on the problem of scheduling wafer lots of several recipe(operation condition) types in the photolithography workstation in a semiconductor wafer fabrication facility, and sequence-dependent recipe set up times may be required at the photolithography machines. In addition, a lot is able to be operated at a machine when the reticle(mask) corresponding to the recipe type is set up in the photolithography machine. We suggest various heuristic algorithms, in which developed recipe selection rules and lot selection rules are used to generate reasonable schedules to minimizing the total weighted flowtime. Results of computational tests on randomly generated test problems show that the suggested algorithms outperform a scheduling method used in a real manufacturing system in terms of the total weighted flowtime of the wafer lots with ready times.
참고문헌 (15)
- Bruno, j., "Scheduling independent tasks to reduce mean finishing time", Comunications of the ACM, 17(7), pp.382~387 (1974)
- 최성우, "Minimizing makespan on a two-machine re-entrant flowshop", JOURNAL OF THE OPERATIONAL RESEARCH SOCIETY, 58(7), pp.972~981 (2007), PALGRAVE MACMILLAN LTD
- Choi, S-W., "Minimizing makespan on an m-machine re-entrant flowshop", COMPUTERS & OPERATIONS RESEARCH, 35(5), pp.1684~1696 (2008), PERGAMON-ELSEVIER SCIENCE LTD
- 최성우, "Minimizing total tardiness on a two-machine re-entrant flowshop", EUROPEAN JOURNAL OF OPERATIONAL RESEARCH, 199(2), pp.375~384 (2009), ELSEVIER SCIENCE BV
- 최성우, "Heuristics for Scheduling Wafer Lots at the Deposition Workstation in a Semiconductor Wafer Fab", 대한산업공학회지, 36(2), pp.125~137 (2010), 대한산업공학회
- Kim, Y-D., "Duedate based scheduling and control policies in a multiproduct semiconductor wafer fabrication facility", IEEE Transactions on Semiconductor Manufacturing, 11(1), pp.155~164 (1998)
- Lawler, E. L., "A functional equation and its application to resource allocation and sequencing problems", Management Science, 16(1), pp.77~84 (1969)
- Lee, C. Y., "A new dynamic programming algorithm for the parallel machines total weighed completion time problem", Operational Research Letters, 11, pp.73~75 (1992)
- 이근철, "주문 생산 방식을 따르는 혼합 흐름 공정에서의 일정계획에 관한 연구", 대한산업공학회지, 32(4), pp.373~381 (2006), 대한산업공학회
- 임승길, "2단계 반도체 제조 공급망을 위한 협업 시스템 개발", 한국경영공학회지, 14(2), pp.11~29 (2009), 한국경영공학회
- Sung, C. S., "Minimizing makespan on a single burn-in oven in semiconductor manufacturing", EUROPEAN JOURNAL OF OPERATIONAL RESEARCH, 120, pp.559~574 (2000), ELSEVIER SCIENCE BV
- Thiagarajan, S., "Scheduling in dynamic assembly job-shops to minimizie the sum of weighted earliness, weighted tardiness and weighted flowtime of jobs", Computers and Industrial Engineering, 49(4), pp.463~503 (2005)
- Webster, S., "A priority rule for minimizing weighted flow time in a class of parallel machine scheduling problems", European Journal of Operational Research, 70(3), pp.327~334 (1993)
- Webster, S., "A note on schedule of n jobs on two identical machines to minimize weighted mean flow time", Computers and Industrial Engineering, 26, pp.795~796 (1994)
- Wein, L. M., "Scheduling semiconductor wafer fabrication", IEEE Transactions on Semiconductor Manufacturing, 1(3), pp.115~130 (1988)