Optimal Conditions for Defect Analysis Using Electron Channeling Contrast Imaging
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초록
Electron channeling contrast imaging (ECCI) is a powerful analyzing tool for identifying lattice defects like dislocations and twin boundaries. By using diffraction-based scanning electron microscopy technique, it enables microstructure analysis, which is comparable to that obtained by transmission electron microscopy that is mostly used in defect analysis. In this report, the optimal conditions for investigating crystal defects are suggested. We could obtain the best ECCI images when both acceleration voltage and probe current are high (30 kV and 20 nA). Also, shortening the working distance (6 mm) enhances the quality of defect imaging.
Abstract
Electron channeling contrast imaging (ECCI) is a powerful analyzing tool for identifying lattice defects like dislocations and twin boundaries. By using diffraction-based scanning electron microscopy technique, it enables microstructure analysis, which is comparable to that obtained by transmission electron microscopy that is mostly used in defect analysis. In this report, the optimal conditions for investigating crystal defects are suggested. We could obtain the best ECCI images when both acceleration voltage and probe current are high (30 kV and 20 nA). Also, shortening the working distance (6 mm) enhances the quality of defect imaging.
참고문헌 (4)
- Carnevale S D, "Applications of electron channeling contrast imaging for the rapid characterization of extended defects in III–V", Si heterostructures, 2015, pp.5, 676~682
- Lloyd G E, "Atomic number and crystallographic contrast images with the SEM: a review of backscattered electron techniques", Mineral. Mag, 51, pp.3~19 (1987)
- Simkin B A, "An experimentally convenient configuration for electron channeling contrast imaging", Ultramicroscopy, 77, pp.65~75 (1999)
- Williams D B, "Transmission Electron Microscopy: A Text Book for Materials Science" (2009), Springer