R.F. magnetron Sputtering 법을 이용한 SnO2 박막센서의 제조 및 알코올 감도 특성
Fabrication of the SnO2 thin-film gas sensors using an R.F. magnetron sputtering method and their alcohol gas-sensing characterization
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The nano-grained Pd or Pt-doped SnO2 thin films were deposited on the alumina substrate at ambient temperature or300ooC for 1 hour or 4 hours in air. Thecrystallinity and microstructure of the annealed films were analyzed. A grain size of the thin films was 30 nm to 50 nm.As a result of gas sensitivity measurements to an alcohol vapor of 36oC, the 2 wt.% Pt-doped SnO2 thin-film sensordeposited at 300oC and annealed at 650oC for 4 hours showed the highest sensitivity.
Abstract
The nano-grained Pd or Pt-doped SnO2 thin films were deposited on the alumina substrate at ambient temperature or300ooC for 1 hour or 4 hours in air. Thecrystallinity and microstructure of the annealed films were analyzed. A grain size of the thin films was 30 nm to 50 nm.As a result of gas sensitivity measurements to an alcohol vapor of 36oC, the 2 wt.% Pt-doped SnO2 thin-film sensordeposited at 300oC and annealed at 650oC for 4 hours showed the highest sensitivity.
참고문헌 (14)
- "Electrical properties of alcohol vapor sensors based on porous silicon", 16, pp.121232~1236 (2003)
- "Electrical and gas-sensing properties of mesostructured tin oxide-based H2 sensor", 85, pp.270~276 (2002)
- "The fabrication of ITO thin-film O3 gas sensors using r.f. magnetron sputtering method and their characterization", (9), pp.840~845 (2002)
- "SnO2 gas sensors", 11(12), pp.34 1998~40
- "Zinc oxide thin film doped with Al2O3 TiO2 and V2O5 as sensitive sensor for trimethylamine gas", 46, pp.75~79 (1998)
- "SnO2-based thin film gas sensors in array for recognizing inflammable gases", 10(3), pp.289~297 (2001)
- "Gas-sensing characteristics of WO3-SnO2 thin-film sensors", 38(12), pp.1180 2001~1186
- "Effects of an Al2O3 surface protective layer on the sensing properties of SnO2 thin film gas sensors", 10(11), pp.778~783 (2000)
- "Properties of Fe2O3-doped SnO2 oxides for CO sensor", 10, pp.~4
- "Physics of thin films Edited by G. Hass", 9, pp.1~71 (1981), Academic Press
- "Fabrication and characteristics of TO F thin film deposited by RF magnetron sputtering", 3, pp.65~73 (1994)
- "Gas detection by activated semiconductor sensor", 40(3), pp.244 1972~249
- "Analysis of noble metal catalytic additives introduced by impregnation of as obtained SnO2 sol-gel nanocrystals for gas sensors", 70, pp.87~100 (2000)
- "Gas-sensing characteristics of semiconducting materials based on In2O3 depending on composition changes", 12, pp.1987~