나노 결정 SnO2와 백금 박막히터를 이용한 접촉연소식 마이크로 가스센서의 감응특성 연구
Catalytic combustion type hydrogen micro gas sensor using thin film heater and nano crystalline SnO2
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초록
Planar type micro catalytic combustible gas sensor was developed by using nano crystalline SnO2. Pt thin film as micro heater was deposited by thermal evaporation method on the alumina substrate. The thickness of the Pt heater was around 160 nm. The sensor showed high reliability with prominent selectivity against various gases(CO, C3H8, CH4) at low operating temperature(156 oC). The sensor with nano crystalline SnO2 showed higher sensitivity than that without nano crystalline SnO2. This can be explained by more active adsorption and oxidation of hydrogen by nano crystalline SnO2 particles. The present planar-type catalytic combustible hydrogen sensor with nano crystalline SnO2 is a good candidate for detection of hydrogen leaks.
Abstract
Planar type micro catalytic combustible gas sensor was developed by using nano crystalline SnO2. Pt thin film as micro heater was deposited by thermal evaporation method on the alumina substrate. The thickness of the Pt heater was around 160 nm. The sensor showed high reliability with prominent selectivity against various gases(CO, C3H8, CH4) at low operating temperature(156 oC). The sensor with nano crystalline SnO2 showed higher sensitivity than that without nano crystalline SnO2. This can be explained by more active adsorption and oxidation of hydrogen by nano crystalline SnO2 particles. The present planar-type catalytic combustible hydrogen sensor with nano crystalline SnO2 is a good candidate for detection of hydrogen leaks.
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