예비 처리 방법에 따른 박막 SnO2 센서의 가스 감응 특성
Gas sensing characteristics of thin film SnO2sensors with different pretreatments
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Abstract
The SnO2 thin film sensors were fabricated by a thermal oxidation method. SnO2 thin film sensors were treated in N2 atmosphere. The sensors with O2 treatment after N2 treatment showed 70% sensitivity for 1ppm H2S gas, which is higher than the sensors with only O2 treatment. The Ni metal was evaporated on Sn thin film on the Al2O3 substrate. And the sensor was heated to grow the Sn nanowire in the tube furnace with N2 atmosphere. Sn nanowire was thermally oxidized in O2 environments. The sensitivity of SnO2 nanowire sensor was measured at 500ppb H2S gas. The selectivity of SnO2 nanowire sensor compared with thin film and thick film SnO2 was measured for H2S, CO, and NH3 in this study.
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