Pd 첨가량 및 첨가방법이 알코올 센서용 SnO2 반도체 후막 특성에 미치는 영향 연구
Effects of Pd Addition Amount and Method on the Characteristics of SnO2 Semiconductor Thick Films for Alcohol Gas Sensors
0
조회
0
다운로드
1
인용
0
참고문헌
키워드
초록
In this paper, two methods of making the Pd-added SnO2 (Pd-SnO2) powder with pure tetragonal phase by the hydrazine method were suggested and compared in terms of crystal structure, surface morphology, and alcohol gas response. One of the addition methods is to use PdCl2 as a Pd source, the other is to use Pd-based organic with oleylamine (OAM). When Pd concentration was increased from 0 to 5 wt%, the average grain size of Pd-SnO2 made with Pd-OAM were decreased from 32 to 12 nm. In the case of using with PdCl2, grain size of the PdCl2 fell to less than 10 nm. However, agglomerated and extruded surface morphology was observed for the films with Pd addition over 4 wt%. The crack-free Pd-SnO2 thick films were able to successfully fill the 30 μm gap of patterned Pt electrodes by optimized ink dropping method. Also, the 2 wt% Pd-SnO2 thick film made with PdCl2 showed gas responses (Rair/Rgas) of 3.7, 5.7 and 9.0 at alcohol concentrations of 10, 50 and 100 ppm, respectively. On the other hand, the prepared 3 wt% Pd-SnO2 thick film with Pd-OAM exhibited very excellent responses of 3.4, 6.8 and 12.2 at the equivalent measurement conditions, respectively. The 3 wt% Pd-SnO2 thick film with Pd-OAM has a specific surface area of 31.39 m2/g.
Abstract
In this paper, two methods of making the Pd-added SnO2 (Pd-SnO2) powder with pure tetragonal phase by the hydrazine method were suggested and compared in terms of crystal structure, surface morphology, and alcohol gas response. One of the addition methods is to use PdCl2 as a Pd source, the other is to use Pd-based organic with oleylamine (OAM). When Pd concentration was increased from 0 to 5 wt%, the average grain size of Pd-SnO2 made with Pd-OAM were decreased from 32 to 12 nm. In the case of using with PdCl2, grain size of the PdCl2 fell to less than 10 nm. However, agglomerated and extruded surface morphology was observed for the films with Pd addition over 4 wt%. The crack-free Pd-SnO2 thick films were able to successfully fill the 30 μm gap of patterned Pt electrodes by optimized ink dropping method. Also, the 2 wt% Pd-SnO2 thick film made with PdCl2 showed gas responses (Rair/Rgas) of 3.7, 5.7 and 9.0 at alcohol concentrations of 10, 50 and 100 ppm, respectively. On the other hand, the prepared 3 wt% Pd-SnO2 thick film with Pd-OAM exhibited very excellent responses of 3.4, 6.8 and 12.2 at the equivalent measurement conditions, respectively. The 3 wt% Pd-SnO2 thick film with Pd-OAM has a specific surface area of 31.39 m2/g.
참고문헌 (22)
- Manjeet Kumar, "SnO2 based sensors with improved sensitivity and response-recovery time", Ceram. Int, 40, pp.8411~8418 (2014)
- Jeong-Hoon Jeun, "Synthesis of porous SnO2 foams on SiO2", Si substrate by electrochemical deposition and their gas sensing properties, 2012, 784~790
- Bowen Zhang, "Synthesis and characterization of hierarchical porous SnO2 for enhancing ethanol sensing properties", Appl. Surf. Sci, 363, pp.560~565 (2016)
- Qi-Hui Wu, "Nano SnO2gas sensors", Curr. Nanosci, 6, pp.525~538 (2010)
- Erin P. Stuckert, "Ar", O2 and H2O plasma surface modification of SnO2nanomaterials to increase surface oxidation, 2015, pp.208, 379~388
- Elisabetta Comini, "Metal oxide nano-crystals for gas sensing", Anal. Chim. Acta, 568, pp.28~40 (2006)
- 박성훈, "Co3O4 나노입자가 코팅된 In2O3 나노와이어의 에탄올 가스 검출 특성", 한국표면공학회지, 49(1), pp.75~80 (2016), 한국표면공학회[DOI]
- 강우승, "Au 나노입자가 코팅된 TiO2 나노와이어의 에탄올가스 검출 특성", 한국표면공학회지, 48(5), pp.238~244 (2015), 한국표면공학회[DOI]
- R. G. Pavelko, "Comparative study of nanocrystalline SnO2materials for gas sensor application: Thermal stability and catalytic activity", Sens. Actuators, B, 137, pp.637~643 (2009)
- Beomseok Kim, "Low temperature Pd", SnO2 sensor for carbon monoxide detection, 2013, pp.177, 770~775
- L. K. Bagal, "Influence of Pd-loading on gas sensing characteristics of SnO2 thick films", Ceram. Int, 38, pp.4835~4844 (2012)
- J. Ma, "Synthesis and high sensing properties of a single Pd-doped SnO2 nanoribbon", Nanoscale Res. Lett, 9, pp.503~ (2014)
- 이만종, "Sensing characteristics and surface reaction mechanism of alcohol sensors based on doped SnO2", Journal of Ceramic Processing Research, 7(3), pp.183~191 (2006), 세라믹공정연구센터
- Kug-Hyun Song, "Effect of Residual Chloride Ion on Thermal Decomposition behaviour of Stannic Acid and Physical Properties of SnO2Powder Fabricated for gas sensor", Korean J. Mater. Res, 4(8), pp.934~943 (1994)
- Y. M. Son, "The Effects of Residual Chlorides on Gas sensing Characteristics of Tin Oxide Gas Sensors", J. Electrochem. Soc., 138(7), pp.2185~2189 (1991)
- Nicolas Sergent, "Preparation and characterization of high surface area stannic oxides: structural, textural and semiconducting properties", Sens. Actuators, B, 84, pp.176~188 (2002)
- Mark A. Andio, "Comparison of gas sensor performance of SnO2 nano-structures on microhotplate platforms", Sens. Actuators, B, 165, pp.13~18 (2012)
- S. Brunauer, "Adsorption of gases in multimolecular layers", J. Am. Chem. Soc, 60, pp.309~ (1938)
- Chang-bin Lim, "Microstructure evolution and gas sensitivities of pd-doped SnO2-based sensor prepared by three different catalystaddition processes", Sens. Actuators, B, 30, pp.223~231 (1996)
- R. Q. Tan, "Synthesis, characterization and gas-sensing properties of Pd-doped SnO2 nano particles", Trans. Nonferrous Met. Soc. China, 21(7), pp.1568~1573 (2011)
- J. W. Magee, "Promotion of Pt surfaces for ethanol electrooxidation by the addition of small SnO2nanoparticles: Activity and mechanism", Appl. Catal., B, 152(3), pp.397~402 (2016)
- M. Hubner, "Influences of Al, Pd and Pt additives on the conduction mechanism as well as the surface and bulk properties of SnO2 based polycrystalline thick film gas sensors", Sens. Act. B, 171-172, pp.172~180 (2012)