진공증착법으로 제조한 In2O3 나노벨트막의 NO 가스감지특성
NO gas-sensing properties of In2O3 nanobelt films prepared by thermal evaporation
2
조회
0
다운로드
2
인용
0
참고문헌
초록
Abstract
The films of indium oxide (In2O3) were deposited onto SiO2 coated Si wafers by a thermal evaporation method. Substrate temperature was varied from 25oC to 300oC. Deposition rate increased to 250oC and then decreased rapidly. The crystallographic properties and surface morphologies of the films were investigated by X-ray diffraction (XRD) and scanning electron microscope (SEM), respectively. The films deposited at 250oC were found to have a nanobelt structure. Resistor-type gas-sensors were fabricated with In2O3 films using Pt as electrodes. The resistance variation of In2O3 films with the concentration of NO gas was measured. The In2O3 films deposited at 250oC showed the highest sensitivity to the NO gas.
참고문헌 (14)
- T. Qiang, "SO2 and NO selective adsorption properties of coal-based activated carbons", 84(4), pp.461~465 (2005)
- N. Bukun, "Chemisorption and electrochemical reactions of SO2 on modified SnO2 electrodes", 106(1), pp.153~157 (2005)
- N. Carmona, "Optical sensors for evaluating environmental acidity in the preventive conservation of historical objects", 116(3), pp.398~404 (2004)
- J.-H. Park, "Colorimetric assay for a fast parallel screening of NOx storage", 241(2), pp.470~474 (2006)
- Y. Shimizu, "Basic aspects and challenges of semiconductor gas sensors", 24(6), pp.18~24 (1999)
- 최낙진, "산화주석 기반의 아세토니트릴 검지용 박막형 가스센서", 13(3), pp.218~223 (2004)
- 노효섭, "박막리튬이온전도체를 이용한 전위차 CO2 가스센서", 14(4), pp.258~264 (2005)
- E. Comini, "Light enhanced gas sensing properties of indium oxide and tin dioxide", 65, pp.260~263 (2000)
- H. Steffes, "Fabrication parameters and NO sensitivity of reactively RF-sputtered In2O3 thin films", 68, pp.249~253 (2000)
- P. W. Park, "In2O3", Al2O3 catalysts for NOx reduction in lean condition, 2002., pp.210(1), 97~105
- B.-C. Kim, "Effects of crystal structures on gas sensing properties of nanocrystalline ITO thick films", 89, pp.180~186 (2003)
- X. Wang, "Ammonia sensing characteristics of ZnO nanowires studied by quartz crystal microbalance", 252, pp.2404~2411 (2006)
- J. C. Jiang, "Influence of oxygen plasma treatment on the microstructure of SnOx thin films", 411, pp.203~210 (2002)
- Z. W. Pan, "Nanobelts of semiconducting oxides", 291, pp.1947~ (2001)