고속 마이크로 외팔보 공진시험을 통한 나노스케일 티타늄 박막의 탄성계수 평가
High-speed Microcantilever Resonance Testing on the Young’s Modulus of a Nanoscale Titanium Film
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초록
The Young’s modulus of a nanoscale titanium (Ti) thin-film was evaluated using a high-speed microcantilever resonating at the megahertz frequency in the present study. A 350 nm thick Ti film was deposited on the surface of a silicon microcantilever, and the morphology of the film was analyzed using the atomic force microscopy. The microcantilever was excited to resonate using an ultrasonic pulser that generates tone burst signals and the resonance frequency shift induced by the deposition of Ti was measured using a Michelson interferometer. The Young’s modulus was determined through a modal analysis using the finite element method and the result was validated by the nanoindentation testing, showing good agreement within a relative error of 1.0%. The present study proposes a nanomechanical characterization technique with enhanced accuracy and sensitivity.
Abstract
The Young’s modulus of a nanoscale titanium (Ti) thin-film was evaluated using a high-speed microcantilever resonating at the megahertz frequency in the present study. A 350 nm thick Ti film was deposited on the surface of a silicon microcantilever, and the morphology of the film was analyzed using the atomic force microscopy. The microcantilever was excited to resonate using an ultrasonic pulser that generates tone burst signals and the resonance frequency shift induced by the deposition of Ti was measured using a Michelson interferometer. The Young’s modulus was determined through a modal analysis using the finite element method and the result was validated by the nanoindentation testing, showing good agreement within a relative error of 1.0%. The present study proposes a nanomechanical characterization technique with enhanced accuracy and sensitivity.
참고문헌 (10)
- Kyu-Baik Chang, "The novel stress simulation method for contemporary DRAM capacitor arrays, Simulation of Semiconductor Processes and Devices (SISPAD)", 2013 International Conference on, IEEE, pp.424~427 (2013)
- Thomas P. Burg, "Vacuum-packaged suspended microchannel resonant mass sensor for biomolecular detection", J. Microelectromech. Syst, 15, pp.1466~1476 (2006)
- Kyung-Cho Kim, "Detection of laser generated ultrasonic wave using Michelson interferometer", J. Korean Soc. Nondestr. Test, 20, pp.27~32 (2000)
- Yongqing Fu, "TiNi-based thin films in MEMS applications: a review, Sens", Actuators A, 112, pp.395~408 (2004)
- 김윤영, "초음파 기법을 이용한 고속 마이크로 캔틸레버의 공진 특성평가", 대한기계학회논문집 A, 41(6), pp.483~489 (2017), 대한기계학회
- Warren C. Oliver, "An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments", J. Mater. Res, 7, pp.1564~1583 (1992)
- Toshiyuki Tsuchiya, "Young's modulus, fracture strain, and tensile strength of sputtered titanium thin films", Thin Solid Films, 484, pp.245~250 (2005)
- Kuraganti Vasu, "Nanomechanical behavior of (1 0 0) oriented titanium thin films", Eur. Phys. J. Appl. Phys, 65, pp.30302~ (2004)
- Toshiyuki Tsuchiya, "Cross comparison of thin-film tensile-testing methods examined using singlecrystal silicon, polysilicon, nickel, and titanium films", J. Microelectromech. Syst, 14, pp.1178~1186 (2005)
- Conor O'Mahony, "Titanium as a micromechanical material", J. Micromech. Microeng, 12, pp.438~443 (2002)