열처리에 따른 구리박막의 리플로우 특성
The Effects of the Annealing on the Reflow Property of Cu Thin Film
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Abstract
In this study, the reflow characteristics of copper thin films which is expected to be used as interconnection materials in the next generation semiconductor devices were investigated.Cu thin films were deposited on the TaN diffusion barrier by metal organic chemical vapor deposition(MOCVD) and annealed at the temperature between 250℃ and 550℃ in various ambient gases. When the Cu thin films were annealed in the hydrogen ambience compared with oxygen ambience, sheet resistance of Cu thin films decreased and the breakdown of TaN diffusion barrier was not occurred and a stable Cu/TaN/Si structure was formed at the annealing temperature of 450℃. In addition, reflow properties of Cu thin films could be enhanced in H2 ambient.With Cu reflow process, we could fill the trench patterns of 0.16～0.24 ㎛ with aspect ratio of 4.17～6.25 at the annealing temperature of 450℃ in hydrogen ambience. It is expected that Cu reflow process will be applied to fill the deep pattern with ultra fine structure in metallization.
참고문헌 (5)
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