증착 Power의 세기와 시간에 따른 Fe-N 박막의 구조와 자성 특성
A Study on Structure and Magnetic Properties of Fe-N Thin Films with Different DC Magnetron Sputtering Power and Time
0
조회
0
다운로드
0
인용
0
참고문헌
키워드
초록
Due to the high saturation magnetization (~2.4 T), Fe16N2 is interesting for the thin film application such as an actuator, data record storage and sensor etc. In this study, Fe-N thin films were deposited on Si(001) substrate with various power and deposition time by DC magnetron sputtering, in order to get high portion of Fe16N2¬ phase. Surface morphology, phase formation and magnetic properties were measured. As a result, Saturation magnetization and Remanence magnetization reach to ~2.45 T and 1.41T. But, Coercivity was not enough in this experiments. Its value lower than 100 Oe. Which is very close to theoretical value.
Abstract
Due to the high saturation magnetization (~2.4 T), Fe16N2 is interesting for the thin film application such as an actuator, data record storage and sensor etc. In this study, Fe-N thin films were deposited on Si(001) substrate with various power and deposition time by DC magnetron sputtering, in order to get high portion of Fe16N2¬ phase. Surface morphology, phase formation and magnetic properties were measured. As a result, Saturation magnetization and Remanence magnetization reach to ~2.45 T and 1.41T. But, Coercivity was not enough in this experiments. Its value lower than 100 Oe. Which is very close to theoretical value.
참고문헌 (12)
- S. Yamashita, "Crystal structure and magnetic properties of “α′′-Fe16N2” containing residual α-Fe prepared by low-temperature ammonia nitridation", J. Solid. State. Chem, 194, pp.76~79 (2012)
- M. Takahashi, "α″-Fe16N2 problem - giant magnetic moment or not", J. Mag. Mag. Mater, 208, pp.145~157 (2000)
- H. Takahashi, "Structure and magnetic moment of Fe16N2 sputtered film", J. Mag. Mag. Mater, 174, pp.57~69 (1997)
- I. A. Al-Omari, "High-temperature magnetic properties of mechanically alloyed SmCo5 and YCo5 magnets", IEEE Trans. Magn, 37, pp.2534~2536 (2001)
- A. M. Gabay, "Sintered Sm2Co17 - Based Magnets With Small Additions of Indium", IEEE Trans. Magn, 44, pp.4218~4221 (2008)
- M. Sagawa, "Permanent magnet materials based on the rare earth-iron-boron tetragonal compounds", IEEE Trans. Magn, 20, pp.1584~1589 (1984)
- N. Terada, "Synthesis of iron-nitride films by means of ion beam deposition", IEEE Trans. Magn, 20, pp.1451~1453 (1984)
- K. Umeda, "Magnetic properties of iron nitride thin films with high corrosion-resistance", IEEE Trans. Magn, Mag, 22, pp.591~593 (1986)
- S. Takahashi, "Effects of Substrate Temperature on Magnetic Properties of Iron Nitride Thin Films Prepared by Ion Assisted Vapor Deposition", IEEE Trans. J. Magn. Japan, 4, pp.480~486 (1989)
- Jong-Hwa Lee, "Structure and magnetic properties of Fe-N films deposited by DC magnetron sputtering", Journal of Korean Magnetics Society, 3, pp.87~93 (1993)
- T. K. Kim, "New Magnetic Material Having Ultrahigh Magnetic Moment", Appl. Phys. Lett, 20, pp.492~494 (1972)
- J. Q. Xia, "Radio frequency reactive sputtered iron nitrides using ammonia gas: Structure and magnetic properties", Appl. Phys. Lett, 64, pp.384~386 (1994)