Mn-SnO2/Ag/Mn-SnO2 3중 다층막의 성능지수와 밴딩 특성
Figure of merit and bending characteristics of Mn-SnO2/Ag/Mn-SnO2 tri-layer film
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초록
상온에서 PET 기판 위에 Mn-SnO2/Ag/Mn-SnO2 3중 다층막을 RF/DC 마그네트론 스파터링 방식으로 제조하였다. EMP 시뮬레이션 결과에 따라 Mn-SnO2의 막 두께는 40 nm, Ag 막 두께는 13 nm로 고정하였다. 550 nm 파장대역에서 측정한 3중막의 투과율은 82.9에서 88.1% 범위였으며 면저항은 5.9에서 6.9 Ω/□로 변화하였다. 가장 높은 성능지수(фTC)는 48.1×10-3Ω-1로 나타났다. 곡률반경 4, 5mm 조건에서 inner 밴딩과 out 밴딩의 굽힘시험을 10,000회 실시한 결과 Mn-SnO2/Ag/Mn-SnO2 3중막의 저항변화율은 약 1.5%로 탁월한 기계적 유연성을 보였다.
Abstract
Typical Mn-SnO2/Ag/Mn-SnO2 tri-layer films were prepared on a PET substrate by RF/DC magnetron sputtering method at room temperature. Based on EMP simulation, the thicknesses of the top and bottom Mn-doped SnO2 layers werekept at 40 nm and the Ag layer was maintained at 13 nm for continuous electrical conduction. The experimentally measured optical transmittances at 550 nm wavelength were ranged from 82.9 to 88.1 % and sheet resistances were variedfrom 5.9 to 6.9 Ω/□. The highest value of figure of merit, фTC was 48.1 × 10-3Ω-1. Based on bending test under 4 and 5 mm of inner and outer curvature radius condition, tri-layer film resistance varies only by approximately 1.5 % after 10,000 bending cycles, showing excellent mechanical flexibility.
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