Refractive-index matched layers applied to flexible conductive MTO/Ag/MTO multilayer films on the PET substrate
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A hybrid structure of Mn (2.59 wt.%) doped SnO2 (MTO)/Ag/MTO films with refractive index matching layers (IMLs) wasdeposited on PET substrate by a RF/DC magnetron sputtering method at room temperature. To match the refractive index(n) of MTO/Ag/MTO/PET film, high and low refractive index materials of MTO (n = 2.02) and SiO2 (n = 1.52) were placedbetween MTO/Ag/MTO and PET substrate, respectively. In order to evaluate the effect of IMLs on the reflectivity and colorvariation, an optical simulation program, Essential Macleod Program (EMP) was adopted, in advance. From EMP simulation,the multilayer film of MTO (40 nm)/Ag (13 nm)/MTO (40 nm) with optimized IMLs of SiO2 (120 nm)/MTO (10 nm) showsthe excellent optical transmittance above 86.1% at the 550 nm wavelength, and the pattern visible defect was reduced ascompared with the reference film of MTO/Ag/MTO/PET film without IMLs. From the bending test, the multilayer film ofMTO (40 nm)/Ag (13 nm)/MTO (40 nm)/SiO2 (90 nm)/MTO (10 nm)/PET showed excellent flexible properties. There was only10% resistance variation under 10,000 bending cycle with curvature radius of 5 mm.
Abstract
A hybrid structure of Mn (2.59 wt.%) doped SnO2 (MTO)/Ag/MTO films with refractive index matching layers (IMLs) wasdeposited on PET substrate by a RF/DC magnetron sputtering method at room temperature. To match the refractive index(n) of MTO/Ag/MTO/PET film, high and low refractive index materials of MTO (n = 2.02) and SiO2 (n = 1.52) were placedbetween MTO/Ag/MTO and PET substrate, respectively. In order to evaluate the effect of IMLs on the reflectivity and colorvariation, an optical simulation program, Essential Macleod Program (EMP) was adopted, in advance. From EMP simulation,the multilayer film of MTO (40 nm)/Ag (13 nm)/MTO (40 nm) with optimized IMLs of SiO2 (120 nm)/MTO (10 nm) showsthe excellent optical transmittance above 86.1% at the 550 nm wavelength, and the pattern visible defect was reduced ascompared with the reference film of MTO/Ag/MTO/PET film without IMLs. From the bending test, the multilayer film ofMTO (40 nm)/Ag (13 nm)/MTO (40 nm)/SiO2 (90 nm)/MTO (10 nm)/PET showed excellent flexible properties. There was only10% resistance variation under 10,000 bending cycle with curvature radius of 5 mm.
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