DC마그네트론 스퍼터링법으로 PET 기판위에 저온 증착한ITO박막의 비저항과 굽힘 저항성에 대한 RF인가의 영향
Effect of RF Superimposed DC Magnetron Sputtering on Electrical and Bending Resistances of ITO Films Deposited on PET at Low Temperature
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초록
Indium tin oxide (ITO) films were deposited on PET substrate by RF superimposed DC magnetron sputtering using ITO (doped with 10 wt% SnO₂) target. Substrate temperature was maintained below 75℃ without intentionally substrate heating during the deposition. The discharge voltage of DC power supply was decreased from 280V to 100V when superimposed RF power was increased from 0 W to 150 W. The electrical properties of the ITO films were improved with increasing of superimposed RF power. In the result of cyclic bending test, relatively high mechanical property was obtained for the ITO film deposited with RF power of 75W under DC current of 0.75A which could be attributed to the decrease of internal stress caused by decrease in both deposition rate and plasma impedance.
Abstract
Indium tin oxide (ITO) films were deposited on PET substrate by RF superimposed DC magnetron sputtering using ITO (doped with 10 wt% SnO₂) target. Substrate temperature was maintained below 75℃ without intentionally substrate heating during the deposition. The discharge voltage of DC power supply was decreased from 280V to 100V when superimposed RF power was increased from 0 W to 150 W. The electrical properties of the ITO films were improved with increasing of superimposed RF power. In the result of cyclic bending test, relatively high mechanical property was obtained for the ITO film deposited with RF power of 75W under DC current of 0.75A which could be attributed to the decrease of internal stress caused by decrease in both deposition rate and plasma impedance.
참고문헌 (12)
- K. Noda, , Jpn. J. appl. Phys, 42, pp.1~ (2003)
- A. Kaijou, "U. S. Patent No. 5", 527~, pp.Patent (1999)
- H. Morikawa, , Thin Solid Films, 339, pp.309~ (1999)
- K. Tominaga, , Jpn. J. Appl. Phys, 24, pp.24~ (1985)
- P. K. Song, , Jpn. J. Appl. Phys, 38, pp.2921~ (1999)
- S. Ishibashi, "U.S. Patent 5", ~, pp.Patent (1993)
- Jay Lewis, "Material challenge for flexible organic devices" (2006), Materialstoday 9
- Z. Chen, , Thin Solid Films, 394, pp.202~ (2001)
- Cairns, , Appl. Phys. Letters, 78(11), pp.1425~ (2000)
- D. G. Kim, , Solid State Phenomena, 124-126, pp.367~ (2007)
- 천고은, "DC 마그네트론 스퍼터로 증착한 flexible OLED용 IZO 박막의 기계적 특성과 투습특성에 미치는 반응성 가스 첨가의 효과", 한국표면공학회지, 40(6), pp.245~249 (2007), 한국표면공학회
- T. Sasabayashi, , Thin Solid Films, 445, pp.219~ (2003)