스퍼터링 증착법을 이용한 ZnO/Al/ZnO 구조의 유연투명전극 연구
Aluminum based ZnO/Al/ZnO flexible Transparent Electrodes Fabricated by Magnetron sputtering
2
조회
0
다운로드
2
인용
0
참고문헌
키워드
초록
차세대 유연 광전소자 적용을 위한 금속-산화물 샌드위치 구조인 ZnO/Al/ZnO 박막의 유연투명전극 기초연구를 수행하였다. 모든 증착은 유연성을 가지는 PET 기판 상에서 이루어졌으며, 상·하부 ZnO층의 두께가 광 투과도에 미치는 영향을 확인하기 위하여 Al 층의 두께는 모두 8 nm로 고정시킨 채 상부 ZnO 층의 두께는 5-70 nm, 하부 ZnO 층의두께는 2.5-20 nm까지 변화를 주었다. 가시광선영역(380 nm-770 nm) 파장대를 가지는 광원의 투과도에 대하여 측정한결과, 상부 ZnO 층의 두께가 30 nm이며 하부 ZnO 층의 경우 2.5 nm 일 때 가장 높은 투과도를 보였다. 400 nm 파장기준 투과도 62%, 면저항 19 Ω/□, 그리고 곡률반경 5 mm 조건에서의 휨 테스트 후 면저항과 투과도의 변화가 발생하지않는 ZnO/Al/ZnO 유연투명전극 결과를 보고한다.
Abstract
In this study, the feasibility of ZnO/Al/ZnO flexible transparent electrodes for future flexible optoelectronic devices was investigated. All depositions were performed on PET substrates. The thicknesses of the top and bottom ZnO layers were 5-70 nm and 2.5-20 nm, respectively. The highest visible light transmittance was recorded when the thicknesses of the top and bottom ZnO layers 30 nm and 2.5 nm, respectively. 62% optical transmittance (at the wavelength of 400 nm) and sheet resistance of 19 Ω/□ were measured. After repetitive bending test at a curvature radius of 5 mm, the transmittance and sheet resistance did not change.
참고문헌 (18)
- 권용욱, "비틀림 변형 중 ITO 필름의 시편 형태에 따른 기계적 전기적 파괴 연구", 마이크로전자 및 패키징학회지, 24(4), pp.53~57 (2017), 한국마이크로전자및패키징학회
- J. H. Lee, "Very long Ag nanowire synthesis and its application in a highly transparent, conductive and flexible metal electrode touch panel", Nanoscale, 4, pp.6408~ (2012)[DOI]
- J. Wu, "Organic solar cells with solution-processed graphene transparent electrodes", Appl. Phys. Lett., 92, pp.263302~ (2008)[DOI]
- D. S. Hecht, "Carbon-nanotube film on plastic as transparent electrode for resistive touch screens", Journal of the SID, 17(11), pp.941~ (2009)
- J. H. Yun, "Transparent Ultrathin Oxygen-Doped Silver Electrodes for Flexible Organic Solar Cells", Adv. Funct. Mater., pp.1~ (2017)
- G. Zhao, "Stable ultrathin partially oxidized copper film electrode for highly efficient flexible solar cells", Nature communications, 6, pp.8830~ (2015)[DOI]
- J. G. Jang, "Antireflection layer Coating on the Epitaxial Base Si Solar Cell", Proc. International Microelectronics And Packaging Society Conference, 26, pp.141~ (2003)
- K. Fuchs, "The conductivity of thin metallic films according to the electron theory of metals", Proc. Cambridge Philos. Soc., 34, pp.100~ (1938)[DOI]
- E. H. Sondheimer, "The mean free path of electrons in metals", Advances in Physics,, 1(1), pp.1~ (1952)[DOI]
- A. F. Mayadas, "Electrical-resistivity model for polycrystalline films: the case of arbitrary reflection at external surfaces", Phys. Rev., B1, pp.1382~ (1970)
- D. Gall, "Electron mean free path in elemental metals", Journal of Applied Physics, 119(8), pp.085101~ (2016)[DOI]
- J. A. Floro, "The dynamic competition between stress generation and relaxation mechanisms during coalescence of Volmer–Weber thin films", Journal of Applied Physics, 89, pp.4886~ (2001)[DOI]
- J. A. Floro, "The dynamic competition between stress generation and relaxation mechanisms during coalescence of Volmer-Weber thin films", Journal of Applied Physics, 89, pp.4886~ (2001)[DOI]
- 최두호, "On the Potential of Tungsten as Next-generation Semiconductor Interconnects", Electronic Materials Letters, 13(5), pp.449~456 (2017), 대한금속·재료학회[DOI]
- W. Zhang, "Influence of the electron mean free path on the resistivity of thin metal films", Micro-electronic Engineering, 76, pp.146~ (2004)[DOI]
- Y. Lantasov, "New plating bath for electroless copper deposition on sputtered barrier layers", Microelectronic Engineering, 50, pp.441~ (2000)[DOI]
- W. Zhang, "Surface and grain boundary scattering studied in beveled polycrystalline thin copper films", Journal of Vacuum Science & Technology, B22, pp.1830~ (2004)
- C. Zhang, "An ultrathin, smooth, and low-loss Al-doped Ag film and its application as a transparent electrode in organic photovoltaics", Adv. Mater., 26, pp.5696~ (2014)[DOI]