RF magnetron sputter에 의해 제조된 AZO/Ag/AZO 다층박막의 Ag 두께가 전기적 광학적 특성에 미치는 영향
Influence of Ag Thickness on Electrical and Optical Properties of AZO/Ag/AZO Multi-layer Thin Films by RF Magnetron Sputtering
1
조회
0
다운로드
2
인용
0
참고문헌
키워드
초록
Al-doped ZnO(AZO)/Ag/AZO multi-layer films deposited on PET substrate by RF magnetron sputtering have a much better electrical properties than Al-doped ZnO single-layer films. The multi-layer structure consisted of three layers, AZO/Ag/AZO, the optimum thickness of Ag layers was determined to be 112Å for high optical transmittance and good electrical conductivity. With about 1800Å thick AZO films, the multi-layer showed a high optical transmittance in the visible range of the spectrum. The electrical and optical properties of AZO/Ag/AZO were changed mainly by thickness of Ag layers. A high quality transparent electrode, having a resistance as low as 6 W/□ and a high optical transmittance of 87% at 550 nm, was obtained by controlling Ag deposition parameters.
Abstract
Al-doped ZnO(AZO)/Ag/AZO multi-layer films deposited on PET substrate by RF magnetron sputtering have a much better electrical properties than Al-doped ZnO single-layer films. The multi-layer structure consisted of three layers, AZO/Ag/AZO, the optimum thickness of Ag layers was determined to be 112Å for high optical transmittance and good electrical conductivity. With about 1800Å thick AZO films, the multi-layer showed a high optical transmittance in the visible range of the spectrum. The electrical and optical properties of AZO/Ag/AZO were changed mainly by thickness of Ag layers. A high quality transparent electrode, having a resistance as low as 6 W/□ and a high optical transmittance of 87% at 550 nm, was obtained by controlling Ag deposition parameters.
참고문헌 (2)
- "Physics of thin films Vol" (1977), Academic Press
- "to be published in Proceedings of Conference on Plasma and Surface Engineering" (2000)