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태양에너지이용을 위한 TiO2 박막의 제작과 특성

Preparation and Properties of TiO2 Films for Solar Energy Utilization

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초록

TiO2 thin films for solar energy utilization were prepared on ITO coated glass by r.f magnetron sputtering with variations of working pressure, oxygen flow rate and annealing temperature. Ion insertion and extraction reaction, and ion storage properties of films were investigated by using a cyclic voltammetry. Transmittance of thin films in as-prepared, colored and bleached states was measured by UV-VIS spectrophotometer. The samples deposited in our sputtering conditions showed poor electrochromic properties. Improvement in ion storage properties of TiO2 thin film was observed after annealing at temperature of 400 0C in air for 2 hours. It was found that TiO2 thin film in electrochromic device could be used as a passive counter-electrode.

Abstract

TiO2 thin films for solar energy utilization were prepared on ITO coated glass by r.f magnetron sputtering with variations of working pressure, oxygen flow rate and annealing temperature. Ion insertion and extraction reaction, and ion storage properties of films were investigated by using a cyclic voltammetry. Transmittance of thin films in as-prepared, colored and bleached states was measured by UV-VIS spectrophotometer. The samples deposited in our sputtering conditions showed poor electrochromic properties. Improvement in ion storage properties of TiO2 thin film was observed after annealing at temperature of 400 0C in air for 2 hours. It was found that TiO2 thin film in electrochromic device could be used as a passive counter-electrode.

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