산소 분압에 따라 전자빔 증창법으로 제작된 TiO2 박막의 구조적, 광학 특성
Optical and Structural Properties of TiO2 Thin Films Prepared at Various Oxygen Pressure by Electron-Beam Evaporation
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초록
전자빔 증착법을 이용하여 산소 분압에 따라 TiO2 박막을 제작하고, 열처리 온도에 따른 박막의 구조적 특성과 광학적 특성을 분석 하였다. TiO2 박막들의 물리적 특성은 주입된 산소량에 의존하였다.주입된 산소량이 증가 할수록 상전이 온도가 높아지고,가시광선 영역에서 TiO2 박막의 투과율이 증가하였다.그리고 주입된 산소량이 작은 경우,700℃에서 1100℃로 열처리 후 TiO2 박막의 흡수단 이 좀더 장파장으로 이동하였다.
Abstract
We prepared TiO2 thin films by electron-beam evaporation at various oxygen pressures, and investigated their optical and structural properties as a function of the annealing temperature. The physical properties of the TiO2 thin films depend upon the injection oxygen content. With the increased injection of oxygen, the phase transformation temperature and the transmittance of TiO2 thin films in the range of visible wavelength were increased. For low injection of oxygen, the absorption edges of TiO2 thin films were more red-shifted when annealed at temperatures from 700℃to 1100℃.
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