단결정 실리콘 써모파일을 이용한 접촉형 온도센서 개발
Development of a Contact Type Temperature Sensor Using Single Crystal Silicon Thermopile
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In this paper, we developed contact type temperature sensor with single crystal silicon strip thermopile. This sensor consists of 15 ptype single crystal silicon strips, 17 n-types and contact electrodes on silicon dioxide silicon membrane. The result of electromotive force measuring showed very good characteristic as 15.18 mV/ when temperature difference between the two ends of the thermopile occurs by applying thermal contact on the thermopile which was fabricated with silicon strip of 200 length, 20 width, 1 thickness.
Abstract
In this paper, we developed contact type temperature sensor with single crystal silicon strip thermopile. This sensor consists of 15 ptype single crystal silicon strips, 17 n-types and contact electrodes on silicon dioxide silicon membrane. The result of electromotive force measuring showed very good characteristic as 15.18 mV/ when temperature difference between the two ends of the thermopile occurs by applying thermal contact on the thermopile which was fabricated with silicon strip of 200 length, 20 width, 1 thickness.
참고문헌 (7)
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