Growth of AlN crystals by the sublimation process
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초록
AlN crystals were grown by the sublimation process. As grown AlN crystals were the polycrystalline boule in the form of the agglomerate of small AlN single crystalline AlN. As-grown AlN boule has a length about 2~3 mm long and a diameter of 1 inch. The carbon impurities were observed on the surface and inside of the grown AlN crystals and the growth behavior was investigated by optical microscopy and SEM observation.
Abstract
AlN crystals were grown by the sublimation process. As grown AlN crystals were the polycrystalline boule in the form of the agglomerate of small AlN single crystalline AlN. As-grown AlN boule has a length about 2~3 mm long and a diameter of 1 inch. The carbon impurities were observed on the surface and inside of the grown AlN crystals and the growth behavior was investigated by optical microscopy and SEM observation.
참고문헌 (7)
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- M. Bickermann, "PVT growth of bulk AlN crystals with low oxygen contamination", Phys. Stat. Sol, pp.1993~ (2003)
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- B.M. Epelbaum, "Characterization of bulk AlN with low oxygen content", J. of Crystal Growth, 265, pp.577~ (2004)
- B. Liu, "The durability of various crucible materials for aluminum nitride crystal growth by sublimation", MRS Internet J. Nitride Semicond. Res, 9, pp.6~ (2004)