Characteristics of Pt thin films on WC substrate fabricated by ion beam-assisted DC magnetron sputtering for a lens glass mold
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Pt thin films with a Cr or Ti interlayer were deposited onto a tungsten carbide (WC) substrate by ion beam-assisted directcurrent (DC) magnetron sputtering. The percentage composition of Cr and Ti underneath the Pt films varied and the completethin film characteristics were used to categorize specimens. Microstructure and surface analysis of the specimens wereconducted by scanning electron microscopy (SEM), X-ray diffractometry and atomic force microscopy. Mechanical propertiessuch as hardness and adhesion strength of Pt thin films were also examined. Interlayers of pure Ti or Cr were formed withthicknesses of 40 nm and 50 nm, respectively. The growth rates of both Cr and Ti thin films were similar when exposed to thesame deposition conditions. Analysis of the specimen SEM images revealed that all Pt thin films investigated, irrespective oftarget composition, had anisotropic grains with a dense columnar structure. Hardness and adhesion strength values of the Cr/Pt thin films were higher than those of the Ti/Pt thin films.
Abstract
Pt thin films with a Cr or Ti interlayer were deposited onto a tungsten carbide (WC) substrate by ion beam-assisted directcurrent (DC) magnetron sputtering. The percentage composition of Cr and Ti underneath the Pt films varied and the completethin film characteristics were used to categorize specimens. Microstructure and surface analysis of the specimens wereconducted by scanning electron microscopy (SEM), X-ray diffractometry and atomic force microscopy. Mechanical propertiessuch as hardness and adhesion strength of Pt thin films were also examined. Interlayers of pure Ti or Cr were formed withthicknesses of 40 nm and 50 nm, respectively. The growth rates of both Cr and Ti thin films were similar when exposed to thesame deposition conditions. Analysis of the specimen SEM images revealed that all Pt thin films investigated, irrespective oftarget composition, had anisotropic grains with a dense columnar structure. Hardness and adhesion strength values of the Cr/Pt thin films were higher than those of the Ti/Pt thin films.
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