Ion beam assisted DC magnetron sputtering에 의한 렌즈 유리 성형용 WC 합금의 Ir-Re 박막 특성
Characteristics of Ir-Re Thin Films on WC for Lens Glass Molding by Ion Beam Assisted DC Magnetron Sputtering
1
조회
0
다운로드
6
인용
0
참고문헌
키워드
초록
Ir-Re thin films with Ti interlayer were deposited onto the tungsten carbide substrate by ion beam assisted DC magnetron sputtering. The Ir-Re films were prepared with targets of having two atomic percent of 7:3 and 5:5. The microstructure and surface analysis of the specimen were conducted by using SEM, XRD and AFM. Mechanical properties such as hardness and adhesion strength of Ir-Re thin film also were examined. The interlayer of pure titanium was formed with 100nm thickness. The film growth of Ir-30at.%Re was faster than that of Ir-50at.%Re in the same deposition conditions. Ir-Re thin films consisted of dense and columnar structure irrespective of the different target compositions. The values of hardness and adhesion strength of Ir-30at.%Re thin film coated on WC substrate were higher than those of Ir-50at.%Re thin film.
Abstract
Ir-Re thin films with Ti interlayer were deposited onto the tungsten carbide substrate by ion beam assisted DC magnetron sputtering. The Ir-Re films were prepared with targets of having two atomic percent of 7:3 and 5:5. The microstructure and surface analysis of the specimen were conducted by using SEM, XRD and AFM. Mechanical properties such as hardness and adhesion strength of Ir-Re thin film also were examined. The interlayer of pure titanium was formed with 100nm thickness. The film growth of Ir-30at.%Re was faster than that of Ir-50at.%Re in the same deposition conditions. Ir-Re thin films consisted of dense and columnar structure irrespective of the different target compositions. The values of hardness and adhesion strength of Ir-30at.%Re thin film coated on WC substrate were higher than those of Ir-50at.%Re thin film.
참고문헌 (9)
- H. Suzuki, , J. Japan Soc Prec. Engg, 62(4), pp.619~ (1998)
- 김상석, "레이저 빔 프린터용 F-theta Lens 개발", 전기전자재료학회논문지, 19(4), pp.386~390 (2006), 한국전기전자재료학회
- M. J. Chen, "Journal of Materials Processing Technology", pp.91~95 (2002)
- 김현욱, "비구면 Glass 렌즈 성형용 초경합금(WC) 코어의 DLC 코팅 효과", 전기전자재료학회논문지, 19(11), pp.1050~1054 (2006), 한국전기전자재료학회
- H. U. Kim, , Key Engineering Materials, 345, pp.1577~ (2007)
- 김현욱, "성형용 초경합금(WC) 코어면의 Re-Ir 코팅이 형상정도와 표면조도에 미치는 영향에 관한 연구", 전기전자재료학회논문지, 20(9), pp.808~811 (2007), 한국전기전자재료학회
- William D. Westwood, "Sputter Deposition", pp.136~141, AVS
- Y. I. Chen, , Surf. Coat. Technol, 46, pp.371~ (1991)
- J. Stallard, , Tribology Inter- national, 39, pp.159~166 (2006)