Microstructure analysis of DLC thin film fabricated by filtered arc ion plating method
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DLC (diamond liked carbon) coating of the tungsten carbide (WC) alloy core surface for molding a glass aspheric lens improves the quality of glass lens and the molding core and is characterized by high hardness, high elasticity, abrasion resistance and chemical stability. In this study, the effect of DLC coating of a thin film by means of the filtered AIP (arc ion plating) technique was examined on Ra and shape of the coated surface. Roughness before and after DLC coating was measured and the result showed that the roughness was improved after coating as compared to before coating. It was observed that DLC coating of the WC alloy core surface for molding had an effect on improving the roughness and shape of the core surface. It is considered that this will have an effect on improving abrasion resistance and the service life of the core surface.
Abstract
DLC (diamond liked carbon) coating of the tungsten carbide (WC) alloy core surface for molding a glass aspheric lens improves the quality of glass lens and the molding core and is characterized by high hardness, high elasticity, abrasion resistance and chemical stability. In this study, the effect of DLC coating of a thin film by means of the filtered AIP (arc ion plating) technique was examined on Ra and shape of the coated surface. Roughness before and after DLC coating was measured and the result showed that the roughness was improved after coating as compared to before coating. It was observed that DLC coating of the WC alloy core surface for molding had an effect on improving the roughness and shape of the core surface. It is considered that this will have an effect on improving abrasion resistance and the service life of the core surface.
참고문헌 (14)
- 박종석, "Ion beam assisted DC magnetron sputtering에 의한 렌즈 유리 성형용 WC 합금의 Ir-Re 박막 특성", 한국표면공학회지, 41(3), pp.88~93 (2008), 한국표면공학회
- 김혜정, "DOE를 적용한 카메라폰 모듈용 비구면 Glass렌즈의 가압성형조건 연구", 전기전자재료학회논문지, 20(8), pp.720~725 (2007), 한국전기전자재료학회
- A. T. Yi, , J. Am. Ceram. Soc, 88(3), pp.579~586 (2005)
- H. Suzuki, , J. of Jap. Soc. Prec. Eng, 32(1), pp.25~30 (1998)
- 김현욱, "비구면 Glass 렌즈 성형용 초경합금(WC) 코어의 DLC 코팅 효과", 전기전자재료학회논문지, 19(11), pp.1050~1054 (2006), 한국전기전자재료학회
- A. Bagheri khatibani, "Characterization and Gas-sensing Performance of Spray Pyrolysed In2O3 Thin Films: Substrate Temperature Effect", Transactions on Electrical and Electronic Materials, 13(3), pp.111~115 (2012), 한국전기전자재료학회[DOI]
- C. Rincon, , Surface & Coatings Tech, 148, pp.227~283 (2001)
- J. Robertson, , Mater. Sci. Eng, 37(4-6), pp.129~136 (2002)
- K. R. Lee, , Bull. Kor. Inst. Met. & Mater, 6(4), pp.345~361 (1993)
- G. M. Pharr, , Appl. Phys. Lett, 68(6), pp.779~779 (1996)
- Y. Lifshitz, , Diamond and Related Mat, 3(4-6), pp.542~546 (1994)
- C. B. Collins, , Appl. Phys. Lett, 54, pp.216~218 (1989)
- T. Sato, , Appl. Phys A, 45(4), pp.355~360 (1988)
- A. C. Ferrari, , Phys. Rev. B, 61(20), pp.14095~14107 (2000)
