박막형 NTC 열형 센서의 제작 및 특성 평가
Fabrication and characteristic of thin-film NTC thermal sensors
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Abstract
Characteristics of thin-film NTC thermal sensors fabricated by micromachining technology were studied as a function of the thickness of membrane. The overall-structure of thermal sensor has a form of Au/Ti/NTC/SiOx/(100)Si. NTC film of Mn1.5CoNi0.5O4 with 0.5mm in thickness was deposited on SiOx layer (1.2mm) by PLD (pulsed laser deposition) and annealed at 873-1073K in air for 1hour. Au(200nm)/Ti(100nm) electrode was coated on NTC film by dc sputtering. By the results of microstructure, X-ray and NTC analysis, post-annealed NTC films at 973K for 1hour showed the best characteristics as NTC thermal sensing film. In order to reduce the thermal mass and thermal time constant of sensor, the sensing element was built-up on a thin membrane with the thickness of 20-65mm. Sensors with thin sensing membrane showed the good detecting characteristics.
참고문헌 (11)
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