마이크로 습도센서를 위한 질화탄소막 캐패시터의 전기적 특성
Electrical characteristics of carbon nitride capacitor for micro-humidity sensors
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Abstract
Crystalized carbon nitride film that has many stable physical and/or chemical properties has been expected potentialyby a new electrical material. However, one of the most significant problems degrading the quality of carbon nitride filmsgroup in carbon nitride films, caused by a hydrogen attack, was suggested and proved in our previous reports that thisundesired effect could be applied for fabricating micro-humidity sensors. In this study, MIS capacitor and MIM capacitorwith 5m× 5 m meshes were fabricated. As an insulator, carbon nitride film was deposited on a Si3N4/SiO2/Si substrateusing reactive magnetron sputtering system, and its dielectric constant, C-V characteristics and humidity sensing propertieswere investigated. The fabricated humidity sensors showed a linearity in the humidity range of 0 %RH to 80 %RH. Theseresults reveal that MIS and MIM CNx
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