단겹 탄소나노튜브 트랜지스터의 나노습도센서 응용가능성 연구
Possible application of single-walled carbon nanotubetransistors for humidity sensor
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Abstract
The influence of water molecule on the electrical properties of single-walled carbon nanotube field effect transistors (SWNT-FETs) was reported. Conductance suppression was observed with the increase of the humidity. This can be explained by doping of the SWNT-FETs, which has p-type semiconductor characteristic, with the water molecules acting as an electron donor. However, after 65% of humidity, conductance of the SWNT-FETs started to increase again, due to the opening of electron channels. Upon annealing at 400oC in Ar atmosphere, conductance increases more than 500%, and the threshold voltage shifts toward further positive gate voltages. The results of this experiment support possible application of single-walled carbon nanotubes for humidity sensing material.
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