감습 고분자막이 코팅된 수정미소저울 습도센서 제작 및 특성연구

김종철; 최병일; 남현수; 권수용

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감습 고분자막이 코팅된 수정미소저울 습도센서 제작 및 특성연구

Development of a hygroscopic polymer-coated QCM humidity sensor and its characteristics

김종철|최병일|남현수|권수용

한국센서학회|2005.11|센서학회지 (Journal of Sensor Science and Technology)|제14권 제6호|pp. 395-401

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초록

Abstract

A highly stable quartz crystal microbalance (QCM) that showed a stability of frequencies and exhibited a very low noise level has been developed. The long-term drift was <0.05Hz/h over a period of 10h, and the short-term rms (root mean square) noise was <0.015Hz. Our QCM sensor was used as a humidity sensor employing a poly(methyl methacrylate) (PMMA) polymer film as a hygroscopic layer, which showed good characteristics in the relative humidity (RH) range of 2~90% RH. Comparing the characteristics of the QCM sensor with those of other types of humidity sensors employing PMMA film as a hygroscopic layer, and with other QCM sensors employing other hygroscopic layers is represented.

참고문헌 (20)

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초록

Abstract

참고문헌 (20)

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