마이크로 가스센서의 저전력 구동을 위한 마이크로 플랫폼의 제작과 특성
Fabrication and Characteristics of Micro Platform for Micro Gas Sensor with Low Power Consumption
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A Micro platform for micro gas sensor consisted of micro heater, insulator, and sensing electrode on 2 μm thick SiNx membrane. Three types of micro platforms were designed and fabricated with membrane sizes. Total size of micro platform was 2.6 mm by 2.6 mm. Measured power consumptions were 28 mW, 28 mW, and 32.5 mW for Type 1, Type 2, and Type 3. At this moment, temperatures of membranes on the platforms were 295℃, 297℃, and 296℃, respectively. Fabricated micro platform considered appropriate to apply for low power consumption micro gas sensor. Micro gas sensors were prepared by the sequence that SnO_2 nanopowder pastes were dropped on membrane of Type 1 platforms, dried in oven, heat-treated with micro heaters in platforms. One of the micro gas sensors was tested for gas response to 1157 ppm, 578 ppm, and 231 ppm of methane and 1.68 ppm, 0.84 ppm, and 0.42 ppm of NO_2.
Abstract
A Micro platform for micro gas sensor consisted of micro heater, insulator, and sensing electrode on 2 μm thick SiNx membrane. Three types of micro platforms were designed and fabricated with membrane sizes. Total size of micro platform was 2.6 mm by 2.6 mm. Measured power consumptions were 28 mW, 28 mW, and 32.5 mW for Type 1, Type 2, and Type 3. At this moment, temperatures of membranes on the platforms were 295℃, 297℃, and 296℃, respectively. Fabricated micro platform considered appropriate to apply for low power consumption micro gas sensor. Micro gas sensors were prepared by the sequence that SnO_2 nanopowder pastes were dropped on membrane of Type 1 platforms, dried in oven, heat-treated with micro heaters in platforms. One of the micro gas sensors was tested for gas response to 1157 ppm, 578 ppm, and 231 ppm of methane and 1.68 ppm, 0.84 ppm, and 0.42 ppm of NO_2.
참고문헌 (5)
- J. Cerda Belmonte, "Hightemperature low-power performing micromachined suspended micro-hotplate for gas sensing applications", Sensors and Actuators B, 114, pp.826~835 (2006)
- Jean-Baptiste Sanchez, "A selective gas detection micro-device for monitoring the volatile organic compounds pollution", Sensors and Actuators B, 119, pp.227~233 (2006)
- B. H. Weiller, "Space applications of micro hot plate chemical sensors", IMCS The 11th International Meeting on Chemical Sensors (2006)
- D. Briand, "Metal oxide gas sensors on polyimide micro-hotplates", IMCS The 11th International Meeting on Chemical Sensors (2006)
- Kwang-Yong Choi, "Low power micro-gas sensors using mixed SnO2 nanoparticles and MWCNTs to detect NO2, NH3, and xylene gases for ubiquitous sensor network applications", Sensors and Actuators B-Chemical, 150(1), pp.65~72 (2010), ELSEVIER SCIENCE SA