열처리 효과에 따른 SnO2 기반 수소가스 센서의 특성 최적화
Optimization of SnO2 Based H2 Gas Sensor Along with Thermal Treatment Effect
1
조회
0
다운로드
0
인용
0
참고문헌
키워드
초록
Hydrogen gas (H2) which is odorless, colorless is attracting attention as a renewable energy source in varions applications but its leakage can lead to disastrous disasters, such as inflammable, explosive, and narcotic disasters at high concentrations. Therefore, it is necessary to develop H2 gas sensor with high performance. In this paper, we confirmed that H2 gas detection ability of SnO2 based H2 gas sensor along with thermal treatment effect of SnO2. Proposed SnO2 based H2 gas sensor is fabricated by MEMS technologies such as photolithgraphy, sputtering and lift-off process, etc. Deposited SnO2 thin films are thermally treated in various thermal treatement temperature in range of 500–900oC and their H2 gas detection ability is estimatied by measuring output current of H2 gas sensor. Based on experimental results, fabricated H2 gas sensor with SnO2 thin film which is thermally treated at 700oC has a superior H2 gas detection ability, and it can be expected to utilize at the practical applications.
Abstract
Hydrogen gas (H2) which is odorless, colorless is attracting attention as a renewable energy source in varions applications but its leakage can lead to disastrous disasters, such as inflammable, explosive, and narcotic disasters at high concentrations. Therefore, it is necessary to develop H2 gas sensor with high performance. In this paper, we confirmed that H2 gas detection ability of SnO2 based H2 gas sensor along with thermal treatment effect of SnO2. Proposed SnO2 based H2 gas sensor is fabricated by MEMS technologies such as photolithgraphy, sputtering and lift-off process, etc. Deposited SnO2 thin films are thermally treated in various thermal treatement temperature in range of 500–900oC and their H2 gas detection ability is estimatied by measuring output current of H2 gas sensor. Based on experimental results, fabricated H2 gas sensor with SnO2 thin film which is thermally treated at 700oC has a superior H2 gas detection ability, and it can be expected to utilize at the practical applications.
참고문헌 (15)
- 한상도, "수소센서 기술의 고찰과 최근동향", 센서학회지, 19(2), pp.67~86 (2010), 한국센서학회
- I. H. Kadhim, "Hydrogen Gas Sensor Based on Nanocrystalline SnO2 Thin Film Grown on Bare Si Substrates", Nanomicro Lett, 8(1), pp.20~28 (2016)
- M. S. Jo, "Wireless and linear hydrogen detection up to 4% with high sensitivity through phase transition-inhibited Pd nanowires", ACS Nano, 16(8), pp.11957~11967 (2022)
- Q. Ren, "Review-resistive-type hydrogen sensors based on zinc oxide nanostructures", J. Electrochem. Soc, 167(6), pp.067528~067541 (2020)
- I. H. Kadhim, "Hydrogen gas sensing based on nanocrystalline SnO2 thin films operating at low temperatures", Int. J. Hydrog. Energy, 45(46), pp.25599~25607 (2020)
- Y. Chen, "Sensing mechanism of SnO2(1 1 0)surface to H2 : Density functional theory calculations", Sens. Actuators B chem, 220, pp.279~287 (2015)
- A. Shanmugasundaram, "Hierarchical SnO", SnO2 nanocomposites : Formation of in situ p–n junctions and enhanced H2 sensing, 2013, pp.185, 265~273
- S. H. Sun, "Raman scattering study of rutile SnO2 nanobelts synthesized by thermal evaporation of Sn powders", Chem. Phys. Lett, 376(1-2), pp.103~107 (2003)
- D. Leng, "Preparation and Properties of SnO2 Film Deposited by Magnetron Sputtering", Int. J. Photoenergy, 2012, pp.1~6 (2012)
- Y. Liu, "A Highly Sensitive and FastResponding SnO2 Sensor Fabricated by Combustion Chemical Vapor Deposition", Chem. Mater, 17(15), pp.3997~4000 (2005)
- B. K. Min, "SnO2 thin film gas sensor fabricated by ion beam deposition", Sens. Actuators B Chem, 98(2-3), pp.239~246 (2004)
- A. F. Khan, "Effect of annealing on electrical resistivity of rf-magnetron sputtered nanostructured SnO2 thin films", Appl. Surf. Sci, 255(20), pp.8562~8565 (2009)
- S. Mehraj, "Annealed SnO2thin films : Structural, electrical and their magnetic properties", Thin Solid Films, 589, pp.57~65 (2015)
- N. M. Ahmed, "The effect of post annealing temperature on grain size of indium-tin-oxide for optical and electrical properties improvement", Results Phys, 13, pp.102159~102165 (2019)
- Y. Yang, "Annealing effects on SnO2 thin film for H2 gas sensing", Nanomaterials, 12(18), pp.3227~3239 (2022)