평판형 접촉연소식 마이크로 수소센서의 감지특성 향상
Improved hydrogen sensing characteristics of flat type catalytic combustible hydrogen gas sensor of micro-structure
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초록
Flat type catalytic combustible hydrogen sensors were fabricated using platinum micro-heaters and sensing material pastes. The platinum micro-heater was formed on an alumina substrate by sputtering method. The paste for the sensing materials was prepared using γ-Al2O3 30 wt%, SnO2 35 wt%, and Pd/Pt 30 wt% and coated on the platinum micro-heater. The sensing performances were tested for the prepared sensors with different substrate sizes. The micro catalytic combustible hydrogen sensors showed quick response time, high reliability, and good selectivity against various gases (CO, C3H8, CH4) at low operating temperature of 156℃.
Abstract
Flat type catalytic combustible hydrogen sensors were fabricated using platinum micro-heaters and sensing material pastes. The platinum micro-heater was formed on an alumina substrate by sputtering method. The paste for the sensing materials was prepared using γ-Al2O3 30 wt%, SnO2 35 wt%, and Pd/Pt 30 wt% and coated on the platinum micro-heater. The sensing performances were tested for the prepared sensors with different substrate sizes. The micro catalytic combustible hydrogen sensors showed quick response time, high reliability, and good selectivity against various gases (CO, C3H8, CH4) at low operating temperature of 156℃.
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