수소센서 기술의 고찰과 최근동향
Review and new trends of hydrogen gas sensor technologies
2
조회
0
다운로드
10
인용
0
참고문헌
키워드
초록
Hydrogen is emerging as clean fuel and important industrial raw materials. The hydrogen gas is not sensed by the human olfactory system, But the combustion characteristics of hydrogen is that the ignition is very easy, the propagation speed of the flame is very fast and explosion limits is a wide range of 4 %~75 %. Therefore it is extremely in danger, and the need for its leakage detection technologies is especially important in places such as a production, transportation, storage and usage. The hydrogen sensors are classified with ceramic type, semiconductor type, optical type, electrochemical type and so on. Hydrogen sensors and their technologies are reviewed in detail for materials, fabrication process, sensing characteristics, good point and faults, and production and utilization of sensors be discussed.
Abstract
Hydrogen is emerging as clean fuel and important industrial raw materials. The hydrogen gas is not sensed by the human olfactory system, But the combustion characteristics of hydrogen is that the ignition is very easy, the propagation speed of the flame is very fast and explosion limits is a wide range of 4 %~75 %. Therefore it is extremely in danger, and the need for its leakage detection technologies is especially important in places such as a production, transportation, storage and usage. The hydrogen sensors are classified with ceramic type, semiconductor type, optical type, electrochemical type and so on. Hydrogen sensors and their technologies are reviewed in detail for materials, fabrication process, sensing characteristics, good point and faults, and production and utilization of sensors be discussed.
참고문헌 (74)
- 千原国宏, "센서공학" (1987), 東逸出版社
- 이덕동, "대기환경센서기술" (2007), 경북대학교출판부
- Gerard C. M. Meijer, "Smart Sensor Systems" (2008), John Wiley & Sons
- S. M. Sze, "Semiconductor Sensors" (1994), John Wiley & Sons
- H. Baltes, "Sensors Update", ~ (2001)
- Ursula E. Spichiger, "Chemical Sensors and Biosensors for Medical and Biological Applications" (2004)
- 손병기, "센서공학" (1996), 일진사
- Craig A. Grimes, "Encyclopedia of Sensors" (2006), American Scientific Publishers
- 太田時男, "水素エネルギー最先端技術" (1995), NTS
- 수소의 안전대책 및 물성에 관한연구(I), "심규성", ~ (1991)
- 太田時男, "水素에너지" (1988), 21세기문화사
- Cutlerj. Cleceland, "Encyclopedia of Energy 3" (2004), Elsevier Inc
- 고성능 수소검지 센서개발에 관한 연구, "한상도", ~ (2009)
- 고성능 수소검지 센서 기술 개발, "한상도", ~ (2006)
- 수소 시스템의 안전 모니터링용 핵심 소 자 개발, "한상도", ~ (2007)
- 이대식, "접촉연소식 가스센서의 탄화수소계 가스 감응 특성", 센서학회지, 8(4), pp.327~332 (1999)
- 홍대웅, "TiO2 광촉매와 UV LED를 이용한 접촉연소식 수소센서", 센서학회지, 16(1), pp.7~10 (2007), 한국센서학회
- 박효덕, "탄화수소계 가스 감지용 접촉연소식 가스센서의 제조", 센서학회지, 3(3), pp.9~15 (1994)
- 한상도, "나노 결정 SnO2와 백금 박막히터를 이용한 접촉연소식 마이크로 가스센서의 감응특성 연구", 센서학회지, 17(3), pp.178~182 (2008), 한국센서학회
- 김찬우, "평판형 접촉연소식 마이크로 수소센서의 감지특성 향상", 센서학회지, 18(3), pp.202~206 (2009), 한국센서학회
- A. Katsuki, "Hydrogen selective gas sensor based on SnO2", Sensors Actuators B, 52, pp.30~37 (1998)
- Zili Zhan, "Investigation of a new In2o3-based selective H2 gas sensor with low power consumtion", Material Chemistry and Physics, 90, pp.250~254 (2005)
- W. S. Shin, "Hydrogen-selective thermoelectric gas sensor", Sensors and Actuators B, 93, pp.304~308 (2003)
- W. Shin a, "Thermoelectric gas sensor for detection of high hydrogen concentration", Sensors and Actuators B, 97, pp.344~347 (2004)
- N. Sawaguchi, "Effect of humidity on the sensing property of thermoelectric hydrogen sensor", Sensors and Actuators B, 108, pp.461~466 (2005)
- J. S. Zhang, "Preparation and characteristics of Pt", ACC catalyst for thermoelectric thin film hydrogen sensor, 2007, pp.128, 266~272
- H. Huang, "Thermoelectric hydrogen sensor working at room temperature prepared by bismuth-telluride Pt", couples and Pt, Sensors and Actuators B, pp.2008, 128[DOI]
- Seiyama T, "Study on a detector for gaseous components using semiconductive thin films", Anal Chem, 38(73), pp.1069~ (1966)
- Tianshu Z, "Selective detection of ethanol vapor, and hydrogen using Cddoped SnO2-based sensors", Sensors Actuators B, 60(15), pp.208~ (1999)
- Shimizu Y, "Modification of H2 sensitive breakdown voltages of SnO2 varistors with noble metals", Sensors Actuators B, 52(4), pp.38~ (1998)
- Shimizu Y, "High H2 sensing performance of anodically oxidized TiO2 film contacted with Pd", Sensors Actuators B, 83(1), pp.195~ (2002)
- Moon WJ, "The CO and H2 gas selectivity of CuO-doped SnO2-nO composite gas sensor", Sensors Actuators B, 87, pp.464~ (2002)
- Wang J, "Preparation of H2 and LPG gas sensor", Sensors Actuators B, 84, pp.95~ (2002)
- 백태성, "유중 용존수소 감지를 위 한 Pd", Pt Gate MISFET 센서의 제조와 그 특징, 1996, pp.5(4), 41~46
- 조용수, "수중 수소 감지를 위한 MISFET 형 센서제작과 그 특성", 센서학회지, 9(2), pp.113~118 (2000)
- 김갑식, "유중 용존수소 감 지를 위한 Pd", NiCr 게이트 MISFET 센서의 제작, 1997, pp.6(3), 221~226
- 강기호, "Pd-black 촉매금속 이용한 고성능 MISFET 형 수소센서", 센서학회지, 15(2), pp.90~96 (2006), 한국센서학회
- S.-Y. Choi, "No blister formation Pd", Pt double metal gate MISFET hydrogen sensors, 1984, pp.EDL5(1), 14~15
- I. Lundstrom, "A hydrogen-sensitive MOS field-effect transistor", Appl. Phys. Lett, 26, pp.55~56 (1975)
- J. C. Barton, "Hysteresis of the relationships between electrical resistance and the hydrogen content of palladium", Trans. Faraday Soc, 58, pp.1201~1207 (1962)
- P. Frjes, "Thermal characterisation of micro-hotplates used in sensor structures", Superlattices and Microstructures, 35(64), pp.455~ (2004)
- S.M. Lee, "Design and optimisation of a high-temperature silicon micro-hotplate for nanoporous palladium pellistors", Microelectronics Journal, 34 (2003)
- Ingemar Lundstrm, "Twenty-five years of field effect gas sensor research in Linkping", Sensors Actuators B, 121, pp.247~262 (2007)
- 정귀상, "Pd", 다결정 3C-SiC 쇼트키 다이오드형 수소센서의 제작과 그 특성, 2009, pp.18(3), 222~225[DOI]
- 김창교, "Pd-SiC 쇼 트키 다이오드의 수소 가스 감응 특성", 센서학회지, 8(6), pp.448~453 (1999)
- Philippe Colomban, "Proton conductors Solids, membranes and gels-materials and devices" (1992), CAMBRIDGE UNIVERSITY PRESS
- G. Korotcenkov, "Review of electrochemical hydrogen sensor", CHEMICAL REVIEWS, 109(3) (2009)
- I. Treglazov, "Electrocatalytic effects in gas sensors based on low-temperature superprotonics", Sens. Actuators B, 106, pp.164~169 (2005)
- J. Ravi Prakash, "Hydrogen sensors:Role of palladium thin film morphology", Sensors and Actuators B, 120(46), pp.439~ (2007)
- Min Wang, "Palladium-silver thin film for hydrogen sensing", Sensors and Actuators B, 123(6), pp.101~ (2007)
- K.J. Stevens, "Structure of palladium nanoclusters for hydrogen gas sensors", Current Applied Physics, 8(3,4), pp.443~446 (2008), 한국물리학회
- Shufang Yu, "Fabrication of palladium nanotubes and their application in hydrogen sensing", Chem. Mate, 17, pp.3445~3450 (2005)
- E. C. Walter, "Palladium mesowire arrays for fast hydrogen sensors and hydrogen-actuated switches", Anal. Chem, 74, pp.1546~1553 (2002)
- Pushpendra Kumar, "Palladium capped samarium thin films as potential hydrogen sensors", Materials Chemistry and Physics, 88(9), pp.106~ (2004)
- K. Yoshimura, "Hydrogen sensor using reflectance change of switchable mirror thin film", The Electrochemical Society, ~ (2009)
- Zhouying Zhao, "Humidity effects on Pd", Au-based all-optical hydrogen sensors, 2007
- Donato Luna-Moreno, "Effect of the Pd-Au thin film thickness uniformity on the performance of an optical fiber hydrogen sensor", Sensors and Actuators B,, 253, pp.8615~8619 (2007)
- Hamagami. Jun-ichi, "Preparation and characterization of an optically detectable H2 gas sensor consisting of Pd", MoO3 thin film, 1993, pp.B13, 281~283
- A. D'Amico, "Palladiumsurface acoustic wave interaction for hydrogen detection", Appl. Phys. Lett, 41, pp.300~ (1982)
- A. D'Amico, "Surface acoustic wave hydrogen sensor", Sensors and Actuators, 3, pp.31~ (1982)
- V. I. Anisimkina, "Elastic properties of thin-film palladium for surface acoustic wave(SAW)sensors", Sensors and Actuators B, 23 (1995)
- Frank DiMeo Jr, "Micro-hotplate based H2 gas sensors", ~
- Frank DiMeo Jr, "MEMSbased hydrogen gas sensors", Sensors and Actuators B, 117(6), pp.10~ (2006)
- P. Frjes, "Thermal characterisation of micro-hotplates used in sensor structures", Superlattices and Microstructures, 35(64), pp.455~ (2004)
- Isolde Simon, "Micromachined metal oxide gas sensors:opportunities to improve sensor performance", Sensors and Actuators B, 73, pp.1~26 (2001)
- Chaudhari GN, "Structural and gas sensing properties of nanocrystalline TiO2:WO3-based hydrogen sensors", Sensors Actuators B, 115, pp.297~ (2006)
- Shukla S, "Nanocrystalline indium oxidedoped tin oxide thin film as low temperature hydrogen sensor", Sensors and Actuators B, 97(5), pp.256~ (2002)
- Shukla S, "Effect of ultraviolet radiation exposure on room-temperature hydrogen sensitivity of nanocrystalline doped tin oxide sensor incorporated into microelectromechanical systems device", J Appl Phys, 97, pp.054~307 (2005)
- Zhang S.P, "Hydrogen discriminating nano-crystalline doped tin oxide room-temperature microsensor", J Appl Phys, 98, pp.104~306 (2005)
- Han C.-H, "Micro-bead of nanocrystalline F-doped SnO2 as a sensitive hydrogen gas sensor", Sensors and Actuators B, 109, pp.264~ (2005)
- Shufang Yu, "Fabrication of palladium nanotubes and their application in hydrogen sensing", Chem. Mater, 17, pp.3445~3450 (2005)
- K.J. Stevens, "Structure of palladium nanoclusters for hydrogen gas sensors", Current Applied Physics, 8(3,4), pp.443~446 (2008), 한국물리학회
- Shufang Yu, "Fabrication of palladium nanotubes and their application in hydrogen sensing", Chem. Mater, 17, pp.3445~3450 (2005)
- Hydrogen sensors for on board diagnostics, "P.Castello", ~ (2006)
