Preparation of Nanocolumnar In2O3 Thin Films for Highly Sensitive Acetone Gas Sensor
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Well-ordered nanocolumnar indium oxide (In2O3) thin films have been successfully fabricated by glancing angle deposition (GAD) using an e-beam evaporator. Nanocolumnar structures have a porous and large surface area with a narrow neck between nanocolumns, which allows them to detect minute amounts of gases. The nanocolumnar In2O3 thin films were fabricated by the GAD process at five different positions, viz. top, bottom, center, left, and right in a four inch substrate holder. There was a divergence in the thickness and the base resistance of each sensor. However, all the sensors exhibited extremely high sensitivity that was greater than 103 times the change in electrical resistance after being exposed to 50 ppm of acetone gas at 300°C. Furthermore, the nanocolumnar In2O3 sensors displayed an extremely low detection limit (1.2 ppb) in dry atmosphere as well as in high humidity (80%). We demonstrated that the GAD nanocolumnar In2O3 sensors have an enormous potential for many applications owing to their particularly simple and reliable fabrication process
Abstract
Well-ordered nanocolumnar indium oxide (In2O3) thin films have been successfully fabricated by glancing angle deposition (GAD) using an e-beam evaporator. Nanocolumnar structures have a porous and large surface area with a narrow neck between nanocolumns, which allows them to detect minute amounts of gases. The nanocolumnar In2O3 thin films were fabricated by the GAD process at five different positions, viz. top, bottom, center, left, and right in a four inch substrate holder. There was a divergence in the thickness and the base resistance of each sensor. However, all the sensors exhibited extremely high sensitivity that was greater than 103 times the change in electrical resistance after being exposed to 50 ppm of acetone gas at 300°C. Furthermore, the nanocolumnar In2O3 sensors displayed an extremely low detection limit (1.2 ppb) in dry atmosphere as well as in high humidity (80%). We demonstrated that the GAD nanocolumnar In2O3 sensors have an enormous potential for many applications owing to their particularly simple and reliable fabrication process
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