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아세톤의 선택적 감지를 위한 In2O3 zig-zag nanocolumns

Highly ordered In2O3 zig-zag nanocolumns for selective detection of acetone

정수빈|김호균|황준호|이광재|이은솔|손성우|박시형|조윤행|정재한|심영석
한국표면공학회 (The Korean Society of Surface Science and Engineering)|2024.02|한국표면공학회지 (Journal of Surface Science and Engineering)|제57권 제1호|pp. 38-48|DOI 10.5695/JSSE.2024.57.1.38

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키워드

Oblique angle depositionGas sensorsOxide semiconductorsZig-zag nanocolumnIn2O3.
주제분류기계공학

초록

We fabricated In2O3 zig-zag nanocolumns(ZZNCs) by oblique angle deposition method based on e-beam evaporator for highly sensitive and selective CH3COCH3 sensor. Our results indicate that as the ZZNCs layer stacks, the gas response also increases. In comparison to thin films, ZZNCs at 5 layer show a 117-fold enhancement in gas response and a rapid response time (~2 s). When measured with various gases, it showed a high selectivity towards acetone. Under conditions of R.H. 80%, exposure to CH3COCH3 gas theoretically indicated a detection limit of 1.2 part-per-billion(ppb). These results suggest the potential of In2O3 ZZNCs as a breath analyzer for the diagnosis of diabetes.

Abstract

We fabricated In2O3 zig-zag nanocolumns(ZZNCs) by oblique angle deposition method based on e-beam evaporator for highly sensitive and selective CH3COCH3 sensor. Our results indicate that as the ZZNCs layer stacks, the gas response also increases. In comparison to thin films, ZZNCs at 5 layer show a 117-fold enhancement in gas response and a rapid response time (~2 s). When measured with various gases, it showed a high selectivity towards acetone. Under conditions of R.H. 80%, exposure to CH3COCH3 gas theoretically indicated a detection limit of 1.2 part-per-billion(ppb). These results suggest the potential of In2O3 ZZNCs as a breath analyzer for the diagnosis of diabetes.

참고문헌 (37)

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