High Sensitivity and Selectivity of Array Gas Sensor through Glancing Angle Deposition Method
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In this study, we propose an array-type gas sensor with high selectivity and response using multiple oxide semiconductors. The sensor array was composed of SnO2 and In2O3, and the detection characteristics were improved by using Pt, Au, and Pd catalysts. All samples were deposited directly on the Pt interdigitated electrode (IDE) through the e-beam evaporator glancing angle deposition (GAD) method. They grew in the form of well-aligned nanorods at off-axis angles. The prepared SnO2 and In2O3 nanorod samples were exposed to CH3COCH3, C7H8, and NO2 gases in a 300oC dry condition. Au-decorated SnO2, Au-decorated In2O3, and Pd-decorated In2O3 exhibited high selectivity for CH3COCH3, C7H8, and NO2, respectively. They demonstrated a high detection limit of the sub ppb level computationally. In addition, measurements from each sensor were executed in the 40% relative humidity condition. Although there was a slight reduction in detection response, high selectivity and distinguishable detection characteristics were confirmed.
Abstract
In this study, we propose an array-type gas sensor with high selectivity and response using multiple oxide semiconductors. The sensor array was composed of SnO2 and In2O3, and the detection characteristics were improved by using Pt, Au, and Pd catalysts. All samples were deposited directly on the Pt interdigitated electrode (IDE) through the e-beam evaporator glancing angle deposition (GAD) method. They grew in the form of well-aligned nanorods at off-axis angles. The prepared SnO2 and In2O3 nanorod samples were exposed to CH3COCH3, C7H8, and NO2 gases in a 300oC dry condition. Au-decorated SnO2, Au-decorated In2O3, and Pd-decorated In2O3 exhibited high selectivity for CH3COCH3, C7H8, and NO2, respectively. They demonstrated a high detection limit of the sub ppb level computationally. In addition, measurements from each sensor were executed in the 40% relative humidity condition. Although there was a slight reduction in detection response, high selectivity and distinguishable detection characteristics were confirmed.
참고문헌 (13)
- B. de Lacy Costello, "A review of the volatiles from the healthy human body", J. Breath Res., 8(1), pp.014001~014029 (2014)
- Phillips, M., "Detection of volatile biomarkers of therapeutic radiation in breath", J. Breath Res., 7(3), pp.0360002~0360009 (2013)
- A. G. Dent, "Exhaled breath analysis for lung cancer", J. Thoracic Dis, 5, pp.S540(1)~S540(11) (2013)
- A. Bajtarevic, "Noninvasive detection of lung cancer by analysis of exhaled breath", BMC Cancer, 9, pp.348(1)~348(16) (2009)
- O. E. Owen, "Acetone metabolism during diabetic ketoacidosis", Diabetes, 31(3), pp.242~248 (1982)
- M. Kupari, "Breath acetone in congestiveheart failure", Am. J. Cardiol, 76(14), pp.1076~1078 (1995)
- S. S. Sehnert, "Breath biomarkers for detectionof human liver diseases : preliminary study", Biomarkers, 7, pp.174~187 (2002)
- G. Lubes, "GC-MS based metabolomics used for the identification of cancer volatile organic compounds as biomarkers", J. Phar. Biomed. Anal., 147, pp.313~322 (2018)
- Y. Hu, "Rapid response hydrogensensor based on nanoporous Pd thin films", Int. J. Hydrog. Energy, 41(25), pp.10986~10990 (2016)
- N. Brsan, "Understanding the fundamental principles of metal oxide based gas sensors; the example of CO sensing with SnO2 sensors in the presence of humidity", J. Phys. Condens. Matter., 15(20), pp.R813~R839 (2003)
- 한수덕, "Preparation of Nanocolumnar In2O3 Thin Films for Highly Sensitive Acetone Gas Sensor", 센서학회지, 25(6), pp.383~387 (2016), 한국센서학회[DOI]
- Seung Yeop Yi, "In-decorated NiO Nanoigloos Gas Sensor with Morphological Evolution for Ethanol Sensors", 센서학회지, 28(4), pp.231~235 (2019), 한국센서학회
- H.-S. Woo, "Highly sensitive and selective trimethylamine sensor using one-dimensional ZnO-Cr2O3 hetero-nanostructures", Nanotechnology, 23(24), pp.245501(1)~245501(10)