Fabrication of Au-In2O3 Thin/Thick-Film Gas Sensors and Their Sensing Characteristics for Toxic Gases
1
조회
0
다운로드
0
인용
0
참고문헌
키워드
초록
This paper reports on highly sensitive and selective Au- In2O3 thin- and thick film gas sensors for detecting and measuring toxic gases. The used thin film was deposited on an alumina substrate using a high-frequency sputtering method, the sensor substrate with platinumheater and gold electrode was formed by screen printing, and the nano-catalyst material Au was deposited by thermal vapor deposition. The thick-film gas sensor was fabricated by screen printing using Au- In2O3 paste, and the sensor was finalized by annealing in air at800o C. The target toxic gases used were acetaldehyde, dimethyl disulfide, and 2-methyl-1-propanol. The fabricated thin-film gas sensorsshowed excellent sensitivity to dimethyl disulfide, and the thick-film gas sensors showed a strong response to acetaldehyde. In particular,the thin-film sensors annealed at 800o C exhibited excellent sensing characteristics such as high sensitivity, fast recovery, stability, andlinearity. Based on the surface oxidation reaction and electron transfer mechanism of the Au- In2O3 system, a sensing reaction mechanismand surface energy band model for 2-methyl-1-propanol were proposed.
Abstract
This paper reports on highly sensitive and selective Au- In2O3 thin- and thick film gas sensors for detecting and measuring toxic gases. The used thin film was deposited on an alumina substrate using a high-frequency sputtering method, the sensor substrate with platinumheater and gold electrode was formed by screen printing, and the nano-catalyst material Au was deposited by thermal vapor deposition. The thick-film gas sensor was fabricated by screen printing using Au- In2O3 paste, and the sensor was finalized by annealing in air at800o C. The target toxic gases used were acetaldehyde, dimethyl disulfide, and 2-methyl-1-propanol. The fabricated thin-film gas sensorsshowed excellent sensitivity to dimethyl disulfide, and the thick-film gas sensors showed a strong response to acetaldehyde. In particular,the thin-film sensors annealed at 800o C exhibited excellent sensing characteristics such as high sensitivity, fast recovery, stability, andlinearity. Based on the surface oxidation reaction and electron transfer mechanism of the Au- In2O3 system, a sensing reaction mechanismand surface energy band model for 2-methyl-1-propanol were proposed.
참고문헌 (27)
- A. I. Ayesh, "Metal", metal-oxide Nanoclusters for Gas Sensor Applications, 2016, pp.16, 1~17
- A. Soussi, "Smart Sensors and Smart Data for Precision Agriculture : A Review", Sensors, 2(8), pp.2647~2679 (2024)
- Y. Masuda, "Recent advances in SnO2 nanostructure based gas sensors", Sens. Actuators B Chem., 364, pp.1~27 (2022)
- Z. Wang, "Advanced in functional guest materials for resistive gas sensors", RSC Adv., 12, pp.24614~24632 (2022)
- A. Walsh, "Nature of the Band Gap of In2O3 Revealed by First-Principles Calculations and X-Ray Spectroscopy", Phys. Rev. Lett., 100(16), pp.167402(1)~167401(4) (2008)
- B. Horoz, "Effect of SILAR cycle on gas sensing properties of In2O3 thin flms for CO gas sensor", J. Mater. Sci. Mater. Electron., 35(2), pp.163(1)~163(14) (2024)
- M. Haruta, "Size and support-dependency in the catalysis of gold", Catal. Today, 36(1), pp.153~166 (1977)
- A. S. Alshammari, "Heterogeneous Gold Catalysis : From Discovery to Applications", Catalysts, 9(5), pp.402(1)~402(22) (2019)
- H. Steffes, "Enhancement of NO2 sensing properties of In2O3-based thin films using an Au or Ti surface modification", Sens. Actuators B Chem., 78(1-3), pp.106~112 (2001)
- R. Xing, "Preparation and Gas Sensing Properties of In2O3", Au Nanorods for Detection of Volatile Organic Compounds in Exhaled Breath, 2015, pp.5, 10717~
- C. S. Lee, "Highly discriminative And sensitive detection of volatile organic compounds For monitoring indoor air quality using pure and Au-Loaded 2D In2O3 inverse opal thin films", Sens. Actuators B Chem., 273, pp.1~18 (2018)
- P. A. Bogdanov, "Semiconductor sensors for Ammonia determination", Russ. J. Appl. Chem., 72(3), pp.462~465 (1999)
- H. Fu, "Facile preparation of rod-like Au", In2O3 nanocomposites exhibiting high response to CO at room temperature, 2017, pp.243, 516~524
- Y. Sun, "Synthesis of In2O3 nanocubes, nanocube clusters, and nanocubesembedded Au nanoparticles for conductometric CO sensors", Sens. Actuators B Chem., 345, pp.130433~ (2021)
- J. Hu, "Highly sensitive NO2 detection on ppb level by devices based on Pd-loaded In2O3 hierarchical microstructures", Sens. Actuators B Chem., 252, pp.116~126 (2017)
- Y. Zhao, "Selective detection of methane by Pd-In2O3 sensors with a catalyst filter film", Sens. Actuators B Chem., 328, pp.129030~ (2021)
- S. Zhou, "Ag Nanoparticles Sensitized In2O3 Nanograin for the Ultrasensitive HCHO Detection at Room Temperature", Nanoscale Res. Lett., 14, pp.365(1)~365(11) (2019)
- X. Hu, "Highly enhanced NO2 sensing performances of Cudoped In2O3 hierarchical flowers", Sens. Actuators B Chem., 221, pp.297~304 (2015)
- A. Khort, "High-performance selective NO2 gas sensor based on -In2O3–graphene– Cu nanocomposites", Sci. Rep., 13, pp.7834~ (2023)
- N. Yamazoe, "Some basic aspects of semiconductor gas sensors", Chem. Sens. Technol., 4, pp.19~42 (1992)
- N. M. Ahmed, "The effect of post annealing temperature on grain size of indium-tinoxide foroptical and electrical properties improvement", Results Phys., 13, pp.102159~102165 (2019)
- Y. Yang, "Annealing effects on SnO2 thin film for H2 gas sensing", Nanomaterials, 12(18), pp.3227~3239 (2022)
- M. Iwamoto, "Characterization oxygen adsorbates on semiconductive oxides", Chem. Sens. Technol., 4, pp.63~83 (1992)
- G. Heiland, "Physical and chemical aspects of oxidic semiconductor gas sensor", Chem. Sens. Technol., 1, pp.15~38 (1988)
- P. V. Tong, "Porous In2O3 nanorods fabricated by hydrothermal method for an effective CO gas sensor", Mater. Res. Bulletin, 137, pp.111179~ (2021)
- Z. Li, "A fast response & recovery H2S gas sensor based on α-Fe2O3 nanoparticles with ppb level detection limit", J. Hazard. Mater., 300, pp.167~174 (2015)
- K. Wetchakun, "Semiconducting metal oxides as sensors for environmentally hazardous gases", Sens. Actuators B Chem., 160, pp.580~591 (2011)