Fabrication of 1D Metal Oxide Nanostructures Using Glancing Angle Deposition for High Performance Gas Sensors
2
조회
0
다운로드
0
인용
0
참고문헌
키워드
초록
Gas sensors based on metal-oxide-semiconductors are predominantly used in numerous applications including monitoring indoor air quality and detecting harmful substances such as volatile organic compounds. Nanostructures, e.g., nanoparticles, nanotubes, nano- domes, or nanofibers, have been widely utilized to improve the gas sensing properties of metal-oxide-semiconductors by increasing theeffective surface area participating in the surface reaction with target gas molecules. Recently, 1-dimensional (1D) metal oxide nano-structures fabricated using glancing angle deposition (GAD) method with e-beam evaporation have been widely employed to increasethe surface-to-volume ratio significantly with large-area uniformity and reproducibility, leading to promising gas sensing properties. Herein, we provide a brief overview of 1D metal oxide nanostructures fabricated using GAD and their gas sensing properties in terms of fabrication methods, morphologies, and additives. Moreover, the gas sensing mechanisms and perspectives are presented.
Abstract
Gas sensors based on metal-oxide-semiconductors are predominantly used in numerous applications including monitoring indoor air quality and detecting harmful substances such as volatile organic compounds. Nanostructures, e.g., nanoparticles, nanotubes, nano- domes, or nanofibers, have been widely utilized to improve the gas sensing properties of metal-oxide-semiconductors by increasing theeffective surface area participating in the surface reaction with target gas molecules. Recently, 1-dimensional (1D) metal oxide nano-structures fabricated using glancing angle deposition (GAD) method with e-beam evaporation have been widely employed to increasethe surface-to-volume ratio significantly with large-area uniformity and reproducibility, leading to promising gas sensing properties. Herein, we provide a brief overview of 1D metal oxide nanostructures fabricated using GAD and their gas sensing properties in terms of fabrication methods, morphologies, and additives. Moreover, the gas sensing mechanisms and perspectives are presented.
참고문헌 (37)
- G. Ingrosso, "Free radical chemistry and its concern with indoor air quality : an open problem", Microchem. J, 73(1), pp.221~236 (2002)
- Evaluation of Hong Kong’s indoor air quality management programme: certification scheme, objectives, and technology, Bachelor of Sci. Proj. Rep., "A. Anderson", Polytechnic Institute, ~ (2014)
- J. J. Zhang, "Indoor air pollution : a global health concern", Br. Med. Bull, 68(1), pp.209~225 (2003)
- J. W. Yoon, "Trimodally Porous SnO2 Nanospheres with Three-Dimensional Interconnectivity and Size Tunability: A One-Pot Synthetic Route and Potential Application as an Extremely Sensitive Ethanol Detector", NPG Asia Mater., 8(3), pp.e244~ (2016)
- H. J. Gwon, "Sensitivity Enhancement of Nanostructured SnO2Gas Sensors Fabricated Using the Glancing Angle Deposition Method", J. Nanosci. Nanotechno, 13(4), pp.2740~2744 (2013)
- Y. -S. Shim, "Transparent conducting oxide electrodes for novel metal oxide gas sensors", Sens. Actuator B-chem, 160(1), pp.357~363 (2011)
- H. J. Kim, "Ultraselective and sensitive detection of xylene and toluene for monitoring indoor air pollution using Crdoped NiO hierarchical nanostructures", Nanoscale, 5(15), pp.7066~7073 (2013)
- H. Kim, "CO gas sensing properties of direct-patternable TiO2thin films containing multi-wall carbon nanotubes", Thin Solid Films, 529, pp.89~93 (2013)
- H. G. Moon, "Highly Ordered Large-Area Colloid Templates for Nanostructured TiO2 Thin Film Gas Sensors", J. Nanosci. Nanotechno, 12(4), pp.3496~3500 (2012)
- 문희규, "Mechanism of the Sensitivity Enhancement in TiO₂ Hollow-Hemisphere Gas Sensors", Electronic Materials Letters, 6(4), pp.135~139 (2010), 대한금속·재료학회
- K. Lee, "Highly sensitive sensors based on metal-oxide nanocolumns for fire detection", Sensors, 17(2), pp.303~ (2017)
- S. D. Han, "Versatile approaches to tune a nanocolumnar structure for optimized electrical properties of In2O3 based gas sensor", Sens. Actuator B-chem, 248, pp.894~901 (2017)
- S. D. Han, "Selfdoped nanocolumnar vanadium oxides thin films for highly selective NO2 gas sensing at low temperature", Sens. Actuator B-chem, 241, pp.40~47 (2017)
- C. S. Lee, "Monolayer Co3O4 Inverse Opals as Multifunctional Sensors for Volatile Organic Compounds", Chem-Eur. J, 22(21), pp.7102~7107 (2016)
- S. Deng, "Reduced graphene oxide conjugated Cu2O nanowire mesocrystals for high-performance NO2 gas sensor", J. Am. Chem. Soc, 134(10), pp.4905~4917 (2012)
- Y. R. Choi, "Role of oxygen functional group in graphene oxide for reversible room-temperature NO2 sensing", Carbon, 91, pp.178~187 (2015)
- Y. H. Kim, "Self-Activated Transparent All Graphene Gas Sensor with Endurance to Humidity and Mechanical Bending", ACS Nano, 9(10), pp.10453~10460 (2015)
- J. -M Jeon, "Microscopic Evidence for Strong Interaction between Pd and Graphene Oxide that Results in Metal-Decoration induced Reduction of Graphene Oxide", Adv. Mater, 29(15) (2017)
- Y. H. Kim, "Ultrasensitive Reversible Oxygen Sensing in Liquid-Exfoliated MoS2 Nanoparticles", J. Mater. Chem. A, 4(16), pp.6070~6076 (2016)
- T. H. Kim, "Two-Dimensional Transition Metal Disulfides for Chemoresistive Gas Sensing : Perspective and Challenges", Chemosensors, 5(2), pp.15~ (2017)
- N. Yamazoe, "Oxide semiconductor gas sensors", Catal. Surv. Asia, 7(1), pp.63~75 (2003)
- N. Yamazoe, "New approaches for improving semiconductor gas sensors", Sens. Actuator B-chem, 5(1-4), pp.7~19 (1991)
- H. G. Moon, "Embossed TiO2 Thin Films with Tailored Links between Hollow Hemispheres: Synthesis and Gas-Sensing Properties", J. Phys. Chem. C, 115(20), pp.9993~9999 (2011)
- 심영석, "Design of Metal Oxide Hollow Structures Using Soft-templating Method for High-Performance Gas Sensors", 센서학회지, 25(3), pp.178~183 (2016), 한국센서학회
- Y. -S. Shim, "Utilization of both-side metal decoration in close-packed SnO2 nanodome arrays for ultrasensitive gas sensing", Sens. Actuator B-chem, 213, pp.314~321 (2015)
- Y. -S. Shim, "Highly sensitive and selective H2 and NO2 gas sensors based on surface-decorated WO3 nanoigloos", Sens. Actuator Bchem, 198, pp.294~301 (2014)
- Y. -S. Shim, "Au-decorated WO3 cross-linked nanodomes for ultrahigh sensitive and selective sensing of NO2 and C2H5OH", RSC Adv, 3(26), pp.10452~10459 (2013)
- D. H. Kim, "Highly Ordered TiO2 Nanotubes on Patterned Substrates : Synthesis in-Place for Ultrasensitive Chemiresistors", J. Phys. Chem. C, 117(34), pp.17824~17831 (2013)
- D. H. Kim, "Vertically Ordered Hematite Nanotube Array as an Ultrasensitive and Rapid Response Acetone Sensor", ACS Appl. Mater. Interfaces, 6(17), pp.14779~14784 (2014)
- W. Huan-Hua, "Strong Surface Diffusion Mediated Glancing-Angle Deposition : Growth, Recrystallization and Reorientation of Tin Nanorods", Chin. Phys. Lett., 25(1), pp.234~ (2008)
- H. G. Moon, "Extremely sensitive and selective NO probe based on villi-like WO3 nanostructures for application to exhaled breath analyzers", ACS Appl. Mater. Interfaces, 5(21), pp.10591~10596 (2013)
- H. G. Moon, "Self-activated ultrahigh chemosensitivity of oxide thin film nanostructures for transparent sensors", Sci. Rep., 2 (2012)
- J. -M. Jeon, "Vertically ordered SnO2 nanobamboos for substantially improved detection of volatile reducing gases", J. Mater. Chem. A, 3(35), pp.17939~17945 (2015)
- J. M. Suh, "Synergetically Selective Toluene Sensing in Hematite-Decorated Nickel Oxide Nanocorals", Adv. Mater. Technol., 2(3) (2017)
- H. G. Moon, "Chemiresistive electronic nose toward detection of biomarkers in exhaled breath", ACS appl. Mater. Interfaces, 8(32), pp.20969~20976 (2016)
- S. Hwang, "A near single crystalline TiO2 nanohelix array : enhanced gas sensing performance and its application as a monolithically integrated electronic nose", Analyst, 138(2), pp.443~450 (2013)
- K. Robbie, "Sculptured thin films and glancing angle deposition : Growth mechanics and applications", J. Vac. Sci. Technol. A, 15(3), pp.1460~1465 (1997)