벌크 마이크로 머시닝을 이용한 고감도 미세 칼로리미터의 설계 및 제작
Design and fabrication of a highly sensitive microcalorimetricbiosensor by bulk micromachining
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Abstract
Calorimeter is one of widely used biosensors. Conventional or existing calorimeters are realized directly on a silicon wafer which has very high thermal conductivity. It results in decreasing temperature difference between junctions and it makes a sensitivity of calorimeter to be decreased. In this study, the microcalorimeter was made by using MEMS(Micro Electro Mechanical Systems)-technology and hot junctions of the microcalorimeter are released from a silicon substrate to reduce loss of generated heat by reactions between biomolecules. Sensitivity of the released microcalorimeter was 18mV/M which is 1.5 times higher than another calorimeters on silicon substrate by reactions between biotin and streptavidin.
참고문헌 (5)
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