바이오 멤스 및 마이크로 시스템 적용을 위한3차원 마이크로 유로 제작

참고문헌 (12)

1. "Three-dimensional micro-channel fabrication in polydimethylsiloxane", 9(1), pp.76~81 (2000)
2. "미소유체 칩 상에 서 Quantum Dot 및 마이크로 비드를 이용한 생체물질 분석", 14(5), pp.308~312 (2005)
3. "PDMS 몰드를 이용한 초고온 MEMS용 SiCN 미세구조물 제작과 그 특성", 15(1), pp.53~57 (2006)
4. "A novel fabrication method of embedded micro channels employing simple UV dosage control and antireflection coating", pp.69~72 (2002)
5. "A novel micro-machining method for the fabrication of thick-film SU-8 embedded microchannels", 11, pp.27~33 (2001)
6. "Integrated vertical screen microfilter system using inclined SU-8 structures", pp.227~230 (2003)
7. "Fabrication of 3D microstructures with inclined", rotated UV lithography, 2003, 554~557
8. "Fabrication of topologically complex three-dimensional microfluidic systems in PDMS by rapid prototyping", 72, pp.3158~3164 (2000)
9. "A micro", nano-fluidic chipbased micro-well array for high-throughput cell analysis and drug screening Proceedings of µ, 2003, 861~864
10. "Modular approach to fabrication of three-dimensional microchannel systems in PDMS-application to sheath flow microchips", 1(2), pp.108~114 (2001)
11. "Microfabrication of 3-dimensional photoresist structures using selective patterning and development on two types of specific resists and its application to microfluidic components", pp.757~760 (2004)
12. "Multilevel microstructure fabrication using single-step 3D photolithography and singlestep electroplating", 3512, pp.358~366 (1998)

관련 논문AI추천