마이크로 플랫폼 상에 나노 감지 재료를 이용한 저전력 NOX 센서의 설계 및 제조
Design and Fabrication of a Micro Gas Sensor Using Nano Sensing Materials on Multi-layer Type Micro Platform with Low Power Consumption
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Abstract
A novel multi-layer type micro gas sensor for NOX detection was designed and fabricated. Micro platform defined as type II-1 in this article for micro gas sensor was fabricated using the MEMS technology to meet the demanding needs of lower power consumption. Nano composite materials were fabricated with nanosized tin oxide powder and multi-wall carbon nano tube (MWCNT) to improve sensitivity. We investigated characteristics of fabricated multi-layer type micro gas sensor with NO2 concentration variations at constant 2.2 V. Sensitivity (S) of micro gas sensor were observed to increase from 2.9, to 7.4 and 11.2 as concentrations of NO2 gases increased from 2.4 ppm, to 3.6 ppm and 4.9 ppm. When 2.4 ppm of NO2 gas was applied, response time and recovery time of micro gas sensor were recorded as 101 seconds and 142 seconds, respectively.