수정미소저울 노점센서 제작 및 반응특성 연구
Development of QCM dew point sensor and itssensing characteristics study
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Abstract
This paper represents development of quartz crystal microbalance (QCM) and usage as a dew point sensor. The temperature of a quartz resonator was controlled precisely from 20oC to 30oC with the ramping rate of 0.1oC/s by using a custom-made crystal holder housing the quartz resonator associated with a thermoelectric cooler (Peltier cooler), which results in the working range from 15.2oC to 24.0oC based on an accurate holder temperature compensation and temperature effect compensation process. The developed QCM dew point sensor and analysis techniques show very good sensing characteristics at measurement of moist air with the relative humidity from 10%R.H. to 90%R.H. generated by a divided-type humidity generator and the dew point temperatures were determined with an accuracy of less than 0.18oC, which also showed good agreement with reference values in their error range.
참고문헌 (14)
- Y. Sakai, "Humidity sensor using cross-linked poly", 66, pp.135~138 (2000)
- R. Anchisini, "Polyphosphazene membrane as a very sensitive resistive and capacitive humidity sensor", pp.99~102 (1996)
- T. E. Brook, "Extending the range of a fibre-optic relative-humidity sensor", pp.272~276 (1997)
- S. P. Lee, "Humidity sensitive field effect transistors", 35, pp.80~84 (1996)
- K. A. Vetelino, "Improved dew point measurements based on a SAW sensor", 35, pp.91~98 (1996)
- M. Neshkiva, "Piezoelelctric quartz crystal humidity sensor using chemically modified nitrated polystyrene as water sorbing coating", 332, pp.93~103 (1996)
- F. P. Delannoy, "Quartz crystal microbalance used as humidity sensor", pp.285~291 (2000)
- L. X. Sun, "Simultaneous determination of the concentration of methanol and relative humidity based on a sing Nafion coated quartz crystal micbrobalance", 421, pp.83~92 (2000)
- S. Mintova, "Nanosized zeolite films for vapor-sensing applications", 50, pp.159~166 (2001)
- R. G. Wylie, "The basic process of the dew point hygrometer", 1 (1965)
- ?C. Lu, "Applications of piezoelectric quartz crystal microbalances", pp.24~ (1984)
- A. Rahtu, "Compensation of temperature effects in quartz crystal microbalance measurements", 80, pp.521~523 (2002)
- V. M. Mecea, "Development and testing of a high temperature quartz crystal microbalance", 46, pp.691~694 (1995)
- L. Niinisto, "Synthesis of oxide thin films and overlayers by atomic layer epitaxy for advanced applications", 41, pp.23~29 (1996)