다결정 SiC 마이크로 공진기의 제작과 그 특성
Fabrication and characteristics of polycrystalline SiC micro resonators
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초록
This paper describes the resonant characteristics of polycrystalline SiC micro resonators. The 1 μm thick polycrystalline 3C-SiC cantilevers with different lengths were fabricated using a surface micromachining technique. Polycrystalline 3C- SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at room temperature. For the 100 ~ 40 μm long cantilevers, the fundamental frequency appeared at 147.2 kHz ~ 856.3 kHz. The 100 μm and 80 μm long cantilevers have second mode resonant frequency at 857.5 kHz and 1.14 MHz, respectively. Therefore, polycrystalline 3C-SiC resonators are suitable for RF MEMS devices and bio/ chemical sensor applications.
Abstract
This paper describes the resonant characteristics of polycrystalline SiC micro resonators. The 1 μm thick polycrystalline 3C-SiC cantilevers with different lengths were fabricated using a surface micromachining technique. Polycrystalline 3C- SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at room temperature. For the 100 ~ 40 μm long cantilevers, the fundamental frequency appeared at 147.2 kHz ~ 856.3 kHz. The 100 μm and 80 μm long cantilevers have second mode resonant frequency at 857.5 kHz and 1.14 MHz, respectively. Therefore, polycrystalline 3C-SiC resonators are suitable for RF MEMS devices and bio/ chemical sensor applications.
참고문헌 (9)
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