ZnO 나노휘스커 소재를 이용한 MEMS가스센서의 소비전력과메탄 감응 특성 연구
Methane sensing characteristics and power consumption ofMEMS gas sensor based on ZnO nanowhiskers
1
조회
0
다운로드
2
인용
0
참고문헌
키워드
초록
A low power gas sensor with microheater was fabricated by MEMS technology. In order to heat up the gas sensing material to a operating temperature, a platinum(Pt) micro heater was built on to the micromachined Si substrate. The width and gap of microheater were 20 ﾠμm and 4.5 ﾠμm, respectively. ZnO nanowhisker arrays were fabricated on a sensor device by hydrothermal method. The sensor device was deposited with ZnO seeds using PLD systems. A 200 ﾠml aqueous solution of 0.1 ﾠmol zinc nitrate hexahydrate, 0.1 ﾠmol hexamethylenetetramine, and 0.02 ﾠmol polyethylenimine was used for growthing ZnO nanowhiskers. The power consumption to heat up the gas sensor to a operating temperature was measured and temperature distribution of sensor was analyzed by a Infrared Thermal Camera. The optimum temperature for highest sensitivity was found to be 250 ﾠoC although relatively high(64 ﾠ%) sensitivity was obtained even at as low as 150 ﾠoC. The power consumption was 72 mW at 250 oC and was only 25 mW at 150 oC.
Abstract
A low power gas sensor with microheater was fabricated by MEMS technology. In order to heat up the gas sensing material to a operating temperature, a platinum(Pt) micro heater was built on to the micromachined Si substrate. The width and gap of microheater were 20 ﾠμm and 4.5 ﾠμm, respectively. ZnO nanowhisker arrays were fabricated on a sensor device by hydrothermal method. The sensor device was deposited with ZnO seeds using PLD systems. A 200 ﾠml aqueous solution of 0.1 ﾠmol zinc nitrate hexahydrate, 0.1 ﾠmol hexamethylenetetramine, and 0.02 ﾠmol polyethylenimine was used for growthing ZnO nanowhiskers. The power consumption to heat up the gas sensor to a operating temperature was measured and temperature distribution of sensor was analyzed by a Infrared Thermal Camera. The optimum temperature for highest sensitivity was found to be 250 ﾠoC although relatively high(64 ﾠ%) sensitivity was obtained even at as low as 150 ﾠoC. The power consumption was 72 mW at 250 oC and was only 25 mW at 150 oC.
참고문헌 (18)
- Q.Schiermeier, "Methane finding baffles scientists", Nature, 439, pp.128~ (2006)
- C. Lu, "Highly hydrogen-sensitive SnO2 nanoscale-particle films with platinum electrodes", Sensors and Actuators B, 146, pp.145~153 (2010)
- S. Santra, "ZnO nano wires grown on SOI CMOS substrate for ethanol sensing", Sensors and Actuators B, 146, pp.559~565 (2010)
- L.V. Thong, "On-chip fabrication of SnO2-nanowire gas sensor:The effect of growth time on sensor performance", Sensors and Actuators B, 146, pp.361~367 (2010)
- K. Chatterjee, "The effect of pall adium incorporation on methane sensitivity of antimony doped tin oxide", Materials Chemistry and Physics, 81, pp.33~38 (2003)
- S.H. Hahn, "Investigation of CO", CH4 mixture measured with differently doped SnO2 sensors, 2001, pp.78, 64~68
- 최낙진, "산화주석 기반의 아세토니트릴 검지용 박막형 가스센서", 센서학회지, 13(3), pp.218~223 (2004), 한국센서학회
- 박용욱, "3차원 ZnO 나노구조체 가스센서", 센서학회지, 19(5), pp.356~360 (2010), 한국센서학회
- D.Kohl, "Function and application of gas sensors", Jounal of Physics D:Applied Physics, 34, pp.125~149 (2001)
- J. Puigcorbe, "Thermal and mechanical analysis of micromachined gas sensor", Journal of Micromechanics and Microengineering, 13, pp.548~556 (2003)
- K.D. Mitzner, "Development of micromachined hazardous gas sensor array", Sensors and Actuators B, 93, pp.92~99 (2003)
- J.S. Suehle, "Tin oxide gas sensor fabricated using CMOS micro-hotplates and in situ processing", IEEE Electron Device Letters, 1, pp.118~120 (1993)
- J.A. Salcedo, "On-chip electrostatic discharge protection for CMOS gas sensor systems-on-a-chip(soc)", Microelectronics Reliability, 46, pp.1285~1294 (2006)
- X. Lafontan, "The advent of MEMS in space", Microelectronics Reliability, 43, pp.1061~1083 (2003)
- E. Comini, "Stable and higly sensitive gas sensors based on semiconducting oxide nanobelts", Appl. Phys. Lett, 81, pp.1869~1871 (2002)
- Z.L.Wang, "Nanobelts,nanowires,and nano diskettes of semiconducting oxieds", Materials to nanodevices, Adv. Mater, 15, pp.432~436 (2003)
- C.M. Carney, "TiO2-SnO2nanostructures and their H2 sensing behavior", Sensors and Actuators B, 108, pp.29~33 (2005)
- N. Yamazoe, "Interactions of tin oxide surface with O2,H2O and H2", Surface Science, 86, pp.335~344 (1979)