3C-SiC 광기전 특성 기반 광학식 수소센서의 제작과 그 특성
Fabrication of an Optical Hydrogen Sensor Based on 3C-SiC Photovoltaic Effect and Its Characteristics
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This paper presents the optical hydrogen sensor based on transparent 3C-SiC membrane and photovoltaic effect. Gasochromic materials of Pd and Pd/WO3 were deposited by sputter on 3C-SiC membrane for gas sensing area. Gasochromic materials change to transparency by exposure to hydrogen. The variations of light intensity by hydrogen generate the photovoltaic of P-N junction between N-type 3C-SiC and P-type Si. Single layer of Pd shows higher photovoltaic compared with Pd/WO3. However, phase transition from to is shown at 6 %. Pd/WO3 structure show the more linear response to hydrogen range of 2 % 10 %. Also, almost 2 times fast response and recovery characteristics are shown at Pd/WO3. These fast performances are come from the fact that Pd promoted the chemical reaction between hydrogen and WO3.
Abstract
This paper presents the optical hydrogen sensor based on transparent 3C-SiC membrane and photovoltaic effect. Gasochromic materials of Pd and Pd/WO3 were deposited by sputter on 3C-SiC membrane for gas sensing area. Gasochromic materials change to transparency by exposure to hydrogen. The variations of light intensity by hydrogen generate the photovoltaic of P-N junction between N-type 3C-SiC and P-type Si. Single layer of Pd shows higher photovoltaic compared with Pd/WO3. However, phase transition from to is shown at 6 %. Pd/WO3 structure show the more linear response to hydrogen range of 2 % 10 %. Also, almost 2 times fast response and recovery characteristics are shown at Pd/WO3. These fast performances are come from the fact that Pd promoted the chemical reaction between hydrogen and WO3.
참고문헌 (7)
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