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저전력 31.6 pJ/step 축차 근사형 용량-디지털 직접 변환 IC

Low Power 31.6 pJ/step Successive Approximation Direct Capacitance-to-Digital Converter

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초록

In this paper, an energy-efficient 11.49-bit successive approximation register (SAR) capacitance-to-digital converter (CDC) for capac- itive sensors with a figure of merit (FoM) of 31.6 pJ/conversion-step is presented. The CDC employs a SAR algorithm to obtain lowpower consumption and a simplified structure. The proposed circuit uses a capacitive sensing amplifier (CSA) and a dynamic latch com-parator to achieve parasitic capacitance-insensitive operation. The CSA adopts a correlated double sampling (CDS) technique to reduceflicker (1/f) noise to achieve low-noise characteristics. The SAR algorithm is implemented in dual operating mode, using an 8-bit coarse programmable capacitor array in the capacitance-domain and an 8-bit R-2R digital-to-analog converter (DAC) in the charge-domain. The proposed CDC achieves a wide input capacitance range of 29.4 pF and a high resolution of 0.449 fF. The CDC is fabricated ina 0.18-µm 1P6M complementary metal-oxide-semiconductor (CMOS) process with an active area of 0.55 mm2. The total power con- sumption of the CDC is 86.4 µW with a 1.8-V supply. The SAR CDC achieves a measured 11.49-bit resolution within a conversion time of 1.025 ms and an energy-efficiency FoM of 31.6 pJ/step.

Abstract

In this paper, an energy-efficient 11.49-bit successive approximation register (SAR) capacitance-to-digital converter (CDC) for capac- itive sensors with a figure of merit (FoM) of 31.6 pJ/conversion-step is presented. The CDC employs a SAR algorithm to obtain lowpower consumption and a simplified structure. The proposed circuit uses a capacitive sensing amplifier (CSA) and a dynamic latch com-parator to achieve parasitic capacitance-insensitive operation. The CSA adopts a correlated double sampling (CDS) technique to reduceflicker (1/f) noise to achieve low-noise characteristics. The SAR algorithm is implemented in dual operating mode, using an 8-bit coarse programmable capacitor array in the capacitance-domain and an 8-bit R-2R digital-to-analog converter (DAC) in the charge-domain. The proposed CDC achieves a wide input capacitance range of 29.4 pF and a high resolution of 0.449 fF. The CDC is fabricated ina 0.18-µm 1P6M complementary metal-oxide-semiconductor (CMOS) process with an active area of 0.55 mm2. The total power con- sumption of the CDC is 86.4 µW with a 1.8-V supply. The SAR CDC achieves a measured 11.49-bit resolution within a conversion time of 1.025 ms and an energy-efficiency FoM of 31.6 pJ/step.

참고문헌 (11)

  1. Hesham Omran, "7.9 pJ", Step energy-efficient multi-slope 13-bit capacitance-to-digital converter, 2014, pp.61(8), 589~593
  2. H. Omran, "A robust parasitic-insensitive successive approximation capacitance-todigital converter", Proc. IEEE CICC, pp.1~4 (2014)
  3. H. Omran, "An integrated energy efficient capacitive sensor digital interface circuit", Sens Actuators A Phys., 216, pp.43~51 (2014)[DOI]
  4. D.-Y. Shin, "A delta-sigma interface circuit for capacitive sensors with an automatically calibrated zero point", IEEE Trans Circuits Syst II Express Briefs, 58(2), pp.90~94 (2011)[DOI]
  5. S. Xia, "A capacitance-todigital converter for displacement sensing with 17 b resolution and 20 conversion time", Int. Solid-State Circuits Conf. Dig. Tech. Papers, pp.197~198 (2012)
  6. P. Bruschi, "A current-mode, dual slope, integrated capacitance-to-pulse duration converter", IEEE J Solid-State Circuits, 42(9), pp.1884~1891 (2007)[DOI]
  7. Z. Tan, "An energy-efficient 15-bit capacitive-sensor interface based on period modulation", IEEE J Solid-State Circuits, 47(7), pp.1703~1711 (2012)[DOI]
  8. A. Alhoshany, "A 45.8 fJ", Step, energy efficient, differential SAR capacitance-to-digital converter for capacitive pressure sensing, 2016, pp.245, 10~18
  9. H. Omran, "A 33fJ", step SAR capacitance-to-digital converter using a chain of inverter-based amplifiers, 2017, pp.64(2), 310~321
  10. Y. Jung, "A 17.4-bit delta sigma capacitance-to-digital converter for one-terminal capacitive sensors", IEEE Trans Circuits Syst II Express Briefs, 64(10), pp.1122~1126 (2017)[DOI]
  11. Z. Tan, "A 1.2-V 8.3-nJ CMOS humidity sensor for RFID applications", IEEE J Solid-State Circuits, 48(10), pp.2469~2477 (2013)[DOI]

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